Monolithic integration of continuously tunable plasmonic nanostructures

Nathan C. Lindquist, Timothy W. Johnson, David J. Norris, Sang Hyun Oh

Research output: Contribution to journalArticlepeer-review

60 Scopus citations


We demonstrate precise three-dimensional integration of smooth bumps, grooves, and apertures in optically thick metal films using template stripping. Patterned silicon wafers are used as high-quality, reusable templates. The heights or depths of the metallic features are controlled to within 2 nm, giving continuously tunable optical properties with sharp and intense plasmonic resonances. Furthermore, we demonstrate a pick-and-place template stripping method in situ, enabling versatile three-dimensional micromanipulation, imaging, and characterization of nanoscale devices.

Original languageEnglish (US)
Pages (from-to)3526-3530
Number of pages5
JournalNano letters
Issue number9
StatePublished - Sep 14 2011


  • Template stripping
  • focused ion beam (FIB)
  • grating
  • plasmonics
  • trapped rainbow


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