Modelling of silicon hydride clustering in a low-pressure silane plasma

Keyphrases

• Silicon Hydride 100%
• Silane Plasma 100%
• Low Pressure 100%
• Anions 66%
• Silylenes 66%
• Low Temperature 33%
• Capacitively Coupled Plasma 33%
• Power Density 33%
• Silane 33%
• Reaction Rate 33%
• Dehydrogenation 33%
• Radio Frequency Power 33%
• Silyl 33%
• Electron Impact Dissociation 33%
• Clustering Model 33%
• Ion Density 33%
• Reactive Radicals 33%
• Silene 33%
• Silyl Radicals 33%
• Discharge Parameters 33%
• Fast Clustering 33%

Chemistry

• Silane 100%
• Silicon Hydride 100%
• Silyl 66%
• Nucleation 33%
• Dehydrogenation 33%

Chemical Engineering

• Silane 100%
• Dehydrogenation 20%