Original language | English (US) |
---|---|
Pages (from-to) | S79-S80 |
Journal | Journal of Aerosol Science |
Volume | 29 |
Issue number | SUPPL 1 |
DOIs | |
State | Published - Sep 1998 |
Keywords
- Chemical Kinetics
- Nucleation
- Silane
- Silicon CVD
M. T. Swihart, S. Nijhawan, M. R. Mahajan, S. M. Suh, S. L. Girshick
Research output: Contribution to journal › Article › peer-review
Original language | English (US) |
---|---|
Pages (from-to) | S79-S80 |
Journal | Journal of Aerosol Science |
Volume | 29 |
Issue number | SUPPL 1 |
DOIs | |
State | Published - Sep 1998 |