Modeling the nucleation kinetics and aerosol dynamics of particle formation during CVD of silicon from silane

M. T. Swihart; S. Nijhawan; M. R. Mahajan; S. M. Suh; S. L. Girshick

doi:10.1016/S0021-8502(98)00123-2

Modeling the nucleation kinetics and aerosol dynamics of particle formation during CVD of silicon from silane

M. T. Swihart, S. Nijhawan, M. R. Mahajan, S. M. Suh, S. L. Girshick

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Original language	English (US)
Pages (from-to)	S79-S80
Journal	Journal of Aerosol Science
Volume	29
Issue number	SUPPL 1
DOIs	https://doi.org/10.1016/S0021-8502(98)00123-2
State	Published - Sep 1998

Keywords

Chemical Kinetics
Nucleation
Silane
Silicon CVD

Access

10.1016/S0021-8502(98)00123-2

Cite this

@article{2f7fa2509bdf446c97112e2a5027f8e6,

title = "Modeling the nucleation kinetics and aerosol dynamics of particle formation during CVD of silicon from silane",

keywords = "Chemical Kinetics, Nucleation, Silane, Silicon CVD",

author = "Swihart, {M. T.} and S. Nijhawan and Mahajan, {M. R.} and Suh, {S. M.} and Girshick, {S. L.}",

year = "1998",

month = sep,

doi = "10.1016/S0021-8502(98)00123-2",

language = "English (US)",

volume = "29",

pages = "S79--S80",

journal = "Journal of Aerosol Science",

issn = "0021-8502",

publisher = "Elsevier Limited",

number = "SUPPL 1",

}

TY - JOUR

T1 - Modeling the nucleation kinetics and aerosol dynamics of particle formation during CVD of silicon from silane

AU - Swihart, M. T.

AU - Nijhawan, S.

AU - Mahajan, M. R.

AU - Suh, S. M.

AU - Girshick, S. L.

PY - 1998/9

Y1 - 1998/9

KW - Chemical Kinetics

KW - Nucleation

KW - Silane

KW - Silicon CVD

UR - http://www.scopus.com/inward/record.url?scp=0040712136&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0040712136&partnerID=8YFLogxK

U2 - 10.1016/S0021-8502(98)00123-2

DO - 10.1016/S0021-8502(98)00123-2

M3 - Article

AN - SCOPUS:0040712136

VL - 29

SP - S79-S80

JO - Journal of Aerosol Science

JF - Journal of Aerosol Science

SN - 0021-8502

IS - SUPPL 1

ER -