Modeling the nucleation kinetics and aerosol dynamics of particle formation during CVD of silicon from silane

M. T. Swihart, S. Nijhawan, M. R. Mahajan, S. M. Suh, S. L. Girshick

Research output: Contribution to journalArticlepeer-review

4 Scopus citations
Original languageEnglish (US)
Pages (from-to)S79-S80
JournalJournal of Aerosol Science
Issue numberSUPPL 1
StatePublished - Sep 1998


  • Chemical Kinetics
  • Nucleation
  • Silane
  • Silicon CVD

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