Modeling the nucleation kinetics and aerosol dynamics of particle formation during CVD of silicon from silane

M. T. Swihart, S. Nijhawan, M. R. Mahajan, S. M. Suh, S. L. Girshick

Research output: Contribution to journalArticlepeer-review

4 Scopus citations
Original languageEnglish (US)
Pages (from-to)S79-S80
JournalJournal of Aerosol Science
Volume29
Issue numberSUPPL 1
DOIs
StatePublished - Sep 1998

Keywords

  • Chemical Kinetics
  • Nucleation
  • Silane
  • Silicon CVD

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