Model polymer etching and surface modification by a time modulated RF plasma jet: Role of atomic oxygen and water vapor

Engineering & Materials Science

• Air 5%
• Alcohols 11%
• Atoms 22%
• Carbonates 12%
• Chemical analysis 14%
• Chemical modification 16%
• Esters 11%
• Etching 69%
• Gases 18%
• Nozzles 9%
• Oxygen 52%
• Plasma jets 100%
• Plasmas 59%
• Polymers 47%
• Polymethyl methacrylates 14%
• Polystyrenes 12%
• Surface treatment 68%
• Water vapor 72%

Physics & Astronomy

• air 6%
• alcohols 11%
• atoms 10%
• carbonates 12%
• decay 6%
• esters 12%
• etching 49%
• gas composition 13%
• gases 5%
• low pressure 9%
• mirrors 7%
• nozzles 10%
• oxygen 39%
• plasma jets 61%
• polymers 37%
• polymethyl methacrylate 11%
• polystyrene 9%
• radio frequencies 55%
• surface reactions 11%
• vapor phases 8%
• water vapor 65%

Chemical Compounds

• Alcohol 4%
• Environment 4%
• Etching 58%
• Gas 12%
• Jet 69%
• Modification 4%
• Plasma 40%
• Pressure 4%
• Reduction 3%
• Surface 5%
• Time 23%
• Water Vapor 61%