Model for the combination of diffusional and inertial particle deposition on inverse surfaces at low pressure

Christof Asbach, Heinz Fissan, Thomas A.J. Kuhlbusch, Jing Wang, David Y.H. Pui

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4 Scopus citations

Abstract

A model was developed to estimate particle contamination probabilities on inverse surfaces at low pressure for inertial and diffusional particle deposition under the influence of gravity, drag, and thermophoresis. The model shows that contamination probabilities strongly depend on particle size, initial velocity, and initial distance between particle and surface. While thermophoresis effectively protects the surface against deposition of particles with 10 mm (or more) initial distance and velocities below 1 ms, the contamination probability of particles with an initial distance of 0.1 mm is very high for small particles due to their high diffusivity and for fast particles due to inertia.

Original languageEnglish (US)
Article number054104
JournalApplied Physics Letters
Volume93
Issue number5
DOIs
StatePublished - Sep 22 2008

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