Abstract
A model was developed to estimate particle contamination probabilities on inverse surfaces at low pressure for inertial and diffusional particle deposition under the influence of gravity, drag, and thermophoresis. The model shows that contamination probabilities strongly depend on particle size, initial velocity, and initial distance between particle and surface. While thermophoresis effectively protects the surface against deposition of particles with 10 mm (or more) initial distance and velocities below 1 ms, the contamination probability of particles with an initial distance of 0.1 mm is very high for small particles due to their high diffusivity and for fast particles due to inertia.
Original language | English (US) |
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Article number | 054104 |
Journal | Applied Physics Letters |
Volume | 93 |
Issue number | 5 |
DOIs | |
State | Published - Sep 22 2008 |