Micromirrors with electrically tunable curvature

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


Micromirrors with current-controlled curvature have been fabricated and tested. The principle behind the devices is that resistive heating changes the temperature of the micromirrors, causing a change in optical coating stress. For highly symmetric mirrors, the variable stress induces a uniform and reversible change in curvature. The mirrors used in this study were surface-micromachined from polysilicon and had gold coatings. The radius of curvature of a typical mirror could be tuned from 2.5 mm to 8.2 mm over a current-induced temperature range from 22°C to 145°C (estimated). The corresponding change in focus over this range, as measured by the Seidel parameters of the wavefront, was 0.38λ while the largest aberration (astigmatism) varied from its zero current value by less than 0.02λ. These results should be readily extendable to tuning or correcting flat mirrors by changing the design stress of the reflective coating.

Original languageEnglish (US)
Title of host publication2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages2
ISBN (Electronic)0780375955, 9780780375956
StatePublished - Jan 1 2002
EventIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Lugano, Switzerland
Duration: Aug 20 2002Aug 23 2002


OtherIEEE/LEOS International Conference on Optical MEMs, OMEMS 2002


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