Micromachining of highly reproducible step substrates for high Tc step junction dc-SQUIDs

J. Wang, B. Han, G. Chen, Q. Yang, T. Cui

Research output: Contribution to journalArticlepeer-review

Abstract

A means to successfully fabricate highly reproducible SrTiO3 step substrates for high Tc dc-Supercon-ducting Quantum Interference Devices (dc-SQUIDs) by micromachining is reported in this paper. At optimized Ar ion milling conditions, an inclined angle from 45 to 50° and a laid angle from 30 to 45°, the highest step angles can be obtained. Under strict process control, the profile of the Nb mask film is clean and sharp. The fabricated step angles are about 71° with steep and flawless topography. The step substrate yield for YBa2Cu3O7-x Josephson step edge junction dc-SQUIDs is 75%. The variation of junction resistance and critical current is ±28.6% and ±42.4% respectively.

Original languageEnglish (US)
Pages (from-to)480-483
Number of pages4
JournalMicrosystem Technologies
Volume9
Issue number6-7
DOIs
StatePublished - Sep 1 2003

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