Micromachined negative thermal expansion thin films

M. S. Sutton; J. Talghader

doi:10.1109/SENSOR.2003.1216974

Micromachined negative thermal expansion thin films

M. S. Sutton, J. Talghader

Electrical and Computer Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

10 Scopus citations

Abstract

Materials with low coefficients of thermal expansion (CTE) are critically important in thin film design to create efficient bimorph actuators and to thermally stabilize structures of low stiffness. We report the first negative thermal expansion (NTE) material (zirconium tungstate) evaporated as a thin film and probe its CTE using a tunable curvature micromirror. The measured CTE of different films are a function of stoichiometry and annealing conditions and CTEs as low as -10×10^-6 K^-1 were measured. The measurements show no hysteresis after several annealing cycles. Additionally, data on optical constants, elastic modulus, film stoichiometry, and micromirror deflection have been obtained.

Original language	English (US)
Title of host publication	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1148-1151
Number of pages	4
ISBN (Electronic)	0780377311, 9780780377318
DOIs	https://doi.org/10.1109/SENSOR.2003.1216974
State	Published - 2003
Event	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States Duration: Jun 8 2003 → Jun 12 2003

Publication series

Name	TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume	2

Conference

Conference	12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
Country/Territory	United States
City	Boston
Period	6/8/03 → 6/12/03

Bibliographical note

Publisher Copyright:
© 2003 IEEE.

Keywords

Actuators
Biomembranes
Micromirrors
Mirrors
Optical films
Substrates
Temperature
Thermal engineering
Thermal expansion
Transistors

Publisher link

10.1109/SENSOR.2003.1216974

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Sutton, M. S., & Talghader, J. (2003). Micromachined negative thermal expansion thin films. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers (pp. 1148-1151). Article 1216974 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSOR.2003.1216974

Micromachined negative thermal expansion thin films. / Sutton, M. S.; Talghader, J.
TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. p. 1148-1151 1216974 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers; Vol. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sutton, MS & Talghader, J 2003, Micromachined negative thermal expansion thin films. in TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers., 1216974, TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers, vol. 2, Institute of Electrical and Electronics Engineers Inc., pp. 1148-1151, 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers, Boston, United States, 6/8/03. https://doi.org/10.1109/SENSOR.2003.1216974

Sutton MS, Talghader J. Micromachined negative thermal expansion thin films. In TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc. 2003. p. 1148-1151. 1216974. (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers). doi: 10.1109/SENSOR.2003.1216974

Sutton, M. S. ; Talghader, J. / Micromachined negative thermal expansion thin films. TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers. Institute of Electrical and Electronics Engineers Inc., 2003. pp. 1148-1151 (TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers).

@inproceedings{e43aa545643c49fab9bdd9abaf8a3425,

title = "Micromachined negative thermal expansion thin films",

abstract = "Materials with low coefficients of thermal expansion (CTE) are critically important in thin film design to create efficient bimorph actuators and to thermally stabilize structures of low stiffness. We report the first negative thermal expansion (NTE) material (zirconium tungstate) evaporated as a thin film and probe its CTE using a tunable curvature micromirror. The measured CTE of different films are a function of stoichiometry and annealing conditions and CTEs as low as -10×10-6 K-1 were measured. The measurements show no hysteresis after several annealing cycles. Additionally, data on optical constants, elastic modulus, film stoichiometry, and micromirror deflection have been obtained.",

keywords = "Actuators, Biomembranes, Micromirrors, Mirrors, Optical films, Substrates, Temperature, Thermal engineering, Thermal expansion, Transistors",

author = "Sutton, {M. S.} and J. Talghader",

note = "Publisher Copyright: {\textcopyright} 2003 IEEE.; 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",

year = "2003",

doi = "10.1109/SENSOR.2003.1216974",

language = "English (US)",

series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1148--1151",

booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",

}

TY - GEN

T1 - Micromachined negative thermal expansion thin films

AU - Sutton, M. S.

AU - Talghader, J.

PY - 2003

Y1 - 2003

N2 - Materials with low coefficients of thermal expansion (CTE) are critically important in thin film design to create efficient bimorph actuators and to thermally stabilize structures of low stiffness. We report the first negative thermal expansion (NTE) material (zirconium tungstate) evaporated as a thin film and probe its CTE using a tunable curvature micromirror. The measured CTE of different films are a function of stoichiometry and annealing conditions and CTEs as low as -10×10-6 K-1 were measured. The measurements show no hysteresis after several annealing cycles. Additionally, data on optical constants, elastic modulus, film stoichiometry, and micromirror deflection have been obtained.

AB - Materials with low coefficients of thermal expansion (CTE) are critically important in thin film design to create efficient bimorph actuators and to thermally stabilize structures of low stiffness. We report the first negative thermal expansion (NTE) material (zirconium tungstate) evaporated as a thin film and probe its CTE using a tunable curvature micromirror. The measured CTE of different films are a function of stoichiometry and annealing conditions and CTEs as low as -10×10-6 K-1 were measured. The measurements show no hysteresis after several annealing cycles. Additionally, data on optical constants, elastic modulus, film stoichiometry, and micromirror deflection have been obtained.

KW - Actuators

KW - Biomembranes

KW - Micromirrors

KW - Mirrors

KW - Optical films

KW - Substrates

KW - Temperature

KW - Thermal engineering

KW - Thermal expansion

KW - Transistors

UR - http://www.scopus.com/inward/record.url?scp=84944742348&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84944742348&partnerID=8YFLogxK

U2 - 10.1109/SENSOR.2003.1216974

DO - 10.1109/SENSOR.2003.1216974

M3 - Conference contribution

AN - SCOPUS:84944742348

T3 - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

SP - 1148

EP - 1151

BT - TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers

Y2 - 8 June 2003 through 12 June 2003

ER -

Micromachined negative thermal expansion thin films

Abstract

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Bibliographical note

Keywords

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