Micromachined negative thermal expansion thin films

M. S. Sutton, J. Talghader

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations

Abstract

Materials with low coefficients of thermal expansion (CTE) are critically important in thin film design to create efficient bimorph actuators and to thermally stabilize structures of low stiffness. We report the first negative thermal expansion (NTE) material (zirconium tungstate) evaporated as a thin film and probe its CTE using a tunable curvature micromirror. The measured CTE of different films are a function of stoichiometry and annealing conditions and CTEs as low as -10×10-6 K-1 were measured. The measurements show no hysteresis after several annealing cycles. Additionally, data on optical constants, elastic modulus, film stoichiometry, and micromirror deflection have been obtained.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1148-1151
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - Jan 1 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume2

Conference

Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Keywords

  • Actuators
  • Biomembranes
  • Micromirrors
  • Mirrors
  • Optical films
  • Substrates
  • Temperature
  • Thermal engineering
  • Thermal expansion
  • Transistors

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