Micromachined infrared detectors based on pyroelectric thin films

Dennis L. Polla, P. F. Baude, L. Pham, Q. Mei, J. R. Choi, Chian Ping Ye, Lorraine F Francis, Tho T. Vu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Citations (Scopus)

Abstract

Solid-state micromachining techniques have been used in the fabrication of low-stress silicon nitride thermal isolation structures for pyroelectric detectors. Thin films of PbTiO 3 and other related perovskite materials are integrated on these structures. Process compatibility with NMOS electronics is demonstrated.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsBjorn F. Andresen, Marija S. Scholl
Pages602-611
Number of pages10
Volume2552
Edition2
StatePublished - Dec 1 1995
EventInfrared Technology XXI. Part 1 (of 2) - San Diego, CA, USA
Duration: Jul 9 1995Jul 13 1995

Other

OtherInfrared Technology XXI. Part 1 (of 2)
CitySan Diego, CA, USA
Period7/9/957/13/95

Fingerprint

Infrared Detectors
Infrared detectors
Micromachining
infrared detectors
micromachining
Silicon nitride
silicon nitrides
Perovskite
compatibility
Thin Films
isolation
Electronic equipment
Detectors
solid state
Silicon Nitride
Fabrication
Thin films
fabrication
detectors
thin films

Cite this

Polla, D. L., Baude, P. F., Pham, L., Mei, Q., Choi, J. R., Ye, C. P., ... Vu, T. T. (1995). Micromachined infrared detectors based on pyroelectric thin films. In B. F. Andresen, & M. S. Scholl (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (2 ed., Vol. 2552, pp. 602-611)

Micromachined infrared detectors based on pyroelectric thin films. / Polla, Dennis L.; Baude, P. F.; Pham, L.; Mei, Q.; Choi, J. R.; Ye, Chian Ping; Francis, Lorraine F; Vu, Tho T.

Proceedings of SPIE - The International Society for Optical Engineering. ed. / Bjorn F. Andresen; Marija S. Scholl. Vol. 2552 2. ed. 1995. p. 602-611.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Polla, DL, Baude, PF, Pham, L, Mei, Q, Choi, JR, Ye, CP, Francis, LF & Vu, TT 1995, Micromachined infrared detectors based on pyroelectric thin films. in BF Andresen & MS Scholl (eds), Proceedings of SPIE - The International Society for Optical Engineering. 2 edn, vol. 2552, pp. 602-611, Infrared Technology XXI. Part 1 (of 2), San Diego, CA, USA, 7/9/95.
Polla DL, Baude PF, Pham L, Mei Q, Choi JR, Ye CP et al. Micromachined infrared detectors based on pyroelectric thin films. In Andresen BF, Scholl MS, editors, Proceedings of SPIE - The International Society for Optical Engineering. 2 ed. Vol. 2552. 1995. p. 602-611
Polla, Dennis L. ; Baude, P. F. ; Pham, L. ; Mei, Q. ; Choi, J. R. ; Ye, Chian Ping ; Francis, Lorraine F ; Vu, Tho T. / Micromachined infrared detectors based on pyroelectric thin films. Proceedings of SPIE - The International Society for Optical Engineering. editor / Bjorn F. Andresen ; Marija S. Scholl. Vol. 2552 2. ed. 1995. pp. 602-611
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