Micromachined infrared detectors based on pyroelectric thin films

Dennis L. Polla; P. F. Baude; L. Pham; Q. Mei; J. R. Choi; Chian Ping Ye; L. F. Francis; Tho T. Vu

Micromachined infrared detectors based on pyroelectric thin films

Dennis L. Polla, P. F. Baude, L. Pham, Q. Mei, J. R. Choi, Chian Ping Ye, L. F. Francis, Tho T. Vu

Chemical Engineering and Materials Science

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

6 Scopus citations

Abstract

Solid-state micromachining techniques have been used in the fabrication of low-stress silicon nitride thermal isolation structures for pyroelectric detectors. Thin films of PbTiO ₃ and other related perovskite materials are integrated on these structures. Process compatibility with NMOS electronics is demonstrated.

Original language	English (US)
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
Editors	Bjorn F. Andresen, Marija S. Scholl
Pages	602-611
Number of pages	10
Edition	2
State	Published - 1995
Event	Infrared Technology XXI. Part 1 (of 2) - San Diego, CA, USA Duration: Jul 9 1995 → Jul 13 1995

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Number	2
Volume	2552
ISSN (Print)	0277-786X

Other

Other	Infrared Technology XXI. Part 1 (of 2)
City	San Diego, CA, USA
Period	7/9/95 → 7/13/95

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Polla, D. L., Baude, P. F., Pham, L., Mei, Q., Choi, J. R., Ye, C. P., Francis, L. F., & Vu, T. T. (1995). Micromachined infrared detectors based on pyroelectric thin films. In B. F. Andresen, & M. S. Scholl (Eds.), Proceedings of SPIE - The International Society for Optical Engineering (2 ed., pp. 602-611). (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2552, No. 2).

Micromachined infrared detectors based on pyroelectric thin films. / Polla, Dennis L.; Baude, P. F.; Pham, L. et al.
Proceedings of SPIE - The International Society for Optical Engineering. ed. / Bjorn F. Andresen; Marija S. Scholl. 2. ed. 1995. p. 602-611 (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 2552, No. 2).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Polla, DL, Baude, PF, Pham, L, Mei, Q, Choi, JR, Ye, CP, Francis, LF & Vu, TT 1995, Micromachined infrared detectors based on pyroelectric thin films. in BF Andresen & MS Scholl (eds), Proceedings of SPIE - The International Society for Optical Engineering. 2 edn, Proceedings of SPIE - The International Society for Optical Engineering, no. 2, vol. 2552, pp. 602-611, Infrared Technology XXI. Part 1 (of 2), San Diego, CA, USA, 7/9/95.

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title = "Micromachined infrared detectors based on pyroelectric thin films",

abstract = "Solid-state micromachining techniques have been used in the fabrication of low-stress silicon nitride thermal isolation structures for pyroelectric detectors. Thin films of PbTiO 3 and other related perovskite materials are integrated on these structures. Process compatibility with NMOS electronics is demonstrated.",

author = "Polla, {Dennis L.} and Baude, {P. F.} and L. Pham and Q. Mei and Choi, {J. R.} and Ye, {Chian Ping} and Francis, {L. F.} and Vu, {Tho T.}",

year = "1995",

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series = "Proceedings of SPIE - The International Society for Optical Engineering",

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T1 - Micromachined infrared detectors based on pyroelectric thin films

AU - Polla, Dennis L.

AU - Baude, P. F.

AU - Pham, L.

AU - Mei, Q.

AU - Choi, J. R.

AU - Ye, Chian Ping

AU - Francis, L. F.

AU - Vu, Tho T.

PY - 1995

Y1 - 1995

N2 - Solid-state micromachining techniques have been used in the fabrication of low-stress silicon nitride thermal isolation structures for pyroelectric detectors. Thin films of PbTiO 3 and other related perovskite materials are integrated on these structures. Process compatibility with NMOS electronics is demonstrated.

AB - Solid-state micromachining techniques have been used in the fabrication of low-stress silicon nitride thermal isolation structures for pyroelectric detectors. Thin films of PbTiO 3 and other related perovskite materials are integrated on these structures. Process compatibility with NMOS electronics is demonstrated.

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M3 - Conference contribution

AN - SCOPUS:0029539683

SN - 0819419117

SN - 9780819419118

T3 - Proceedings of SPIE - The International Society for Optical Engineering

SP - 602

EP - 611

BT - Proceedings of SPIE - The International Society for Optical Engineering

A2 - Andresen, Bjorn F.

A2 - Scholl, Marija S.

T2 - Infrared Technology XXI. Part 1 (of 2)

Y2 - 9 July 1995 through 13 July 1995

ER -

Micromachined infrared detectors based on pyroelectric thin films

Abstract

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