Micromachined filters on synthesized substrates

Rhonda Franklin Drayton, Sergio Raima Pacheco, Jianei Wang, Jong Gwan Yook, Linda P.B. Katehi

Research output: Contribution to journalArticle

12 Scopus citations


Effective high-frequency spectrum usage requires high-performance filters to have a sharp cutoff frequency and high stopband attenuation. Stepped-impedance low-pass designs achieve this function best with large ratios of high-to-low-impedance values. In high-index materials, such as Si (11.7) and GaAs (12.9), however, these high-to-low-impedance ratios are around five, thereby significantly limiting optimum filter performance. This paper characterizes the use of Si micromachining for the development of synthesized substrates, which, when utilized appropriately, can further reduce the low-impedance value or increase the high-impedance value. Both designs have demonstrated high-to-low-impedance ratios that are 1.5-2 times larger than conventional techniques.

Original languageEnglish (US)
Pages (from-to)308-314
Number of pages7
JournalIEEE Transactions on Microwave Theory and Techniques
Issue number2
StatePublished - Feb 2001

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