Microelectronics at the University of Minnesota

Gregory Cibuzar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations


The Microelectronics Laboratory for Research and Education (MLRE) at the University of Minnesota is a class 10 semiconductor fabrication facility dedicated to supporting university research and education, as well as collaborating with other universities and industry in microelectronics-related areas. The facility and its equipment are used by various research groups at Minnesota for work in areas such as compound semiconductor growth, optoelectronics, germanium-silicon, sensors, micromechanics, as well as standard silicon processing. Education centers around several silicon processing courses in the Electrical Engineering Department offered at the advanced undergraduate level. External activities involving other universities and industry usually consist of joint research projects or service for fee work.

Original languageEnglish (US)
Title of host publication1993 University/Government/Industry Microelectronics Symposium
PublisherPubl by IEEE
Number of pages4
ISBN (Print)078030991X
StatePublished - Jan 1 1993
EventProceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium - Research Triangle Park, NC, USA
Duration: May 18 1993May 19 1993

Publication series

Name1993 University/Government/Industry Microelectronics Symposium


ConferenceProceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium
CityResearch Triangle Park, NC, USA


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