Microelectronics at the University of Minnesota

Gregory Cibuzar

Microelectronics at the University of Minnesota

Gregory Cibuzar

University of Minnesota Twin Cities

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

Abstract

The Microelectronics Laboratory for Research and Education (MLRE) at the University of Minnesota is a class 10 semiconductor fabrication facility dedicated to supporting university research and education, as well as collaborating with other universities and industry in microelectronics-related areas. The facility and its equipment are used by various research groups at Minnesota for work in areas such as compound semiconductor growth, optoelectronics, germanium-silicon, sensors, micromechanics, as well as standard silicon processing. Education centers around several silicon processing courses in the Electrical Engineering Department offered at the advanced undergraduate level. External activities involving other universities and industry usually consist of joint research projects or service for fee work.

Original language	English (US)
Title of host publication	1993 University/Government/Industry Microelectronics Symposium
Publisher	Publ by IEEE
Pages	170-173
Number of pages	4
ISBN (Print)	078030991X
State	Published - Jan 1 1993
Event	Proceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium - Research Triangle Park, NC, USA Duration: May 18 1993 → May 19 1993

Publication series

Name	1993 University/Government/Industry Microelectronics Symposium

Conference

Conference	Proceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium
City	Research Triangle Park, NC, USA
Period	5/18/93 → 5/19/93

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title = "Microelectronics at the University of Minnesota",

abstract = "The Microelectronics Laboratory for Research and Education (MLRE) at the University of Minnesota is a class 10 semiconductor fabrication facility dedicated to supporting university research and education, as well as collaborating with other universities and industry in microelectronics-related areas. The facility and its equipment are used by various research groups at Minnesota for work in areas such as compound semiconductor growth, optoelectronics, germanium-silicon, sensors, micromechanics, as well as standard silicon processing. Education centers around several silicon processing courses in the Electrical Engineering Department offered at the advanced undergraduate level. External activities involving other universities and industry usually consist of joint research projects or service for fee work.",

author = "Gregory Cibuzar",

year = "1993",

month = jan,

day = "1",

language = "English (US)",

isbn = "078030991X",

series = "1993 University/Government/Industry Microelectronics Symposium",

publisher = "Publ by IEEE",

pages = "170--173",

booktitle = "1993 University/Government/Industry Microelectronics Symposium",

note = "Proceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium ; Conference date: 18-05-1993 Through 19-05-1993",

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T1 - Microelectronics at the University of Minnesota

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N2 - The Microelectronics Laboratory for Research and Education (MLRE) at the University of Minnesota is a class 10 semiconductor fabrication facility dedicated to supporting university research and education, as well as collaborating with other universities and industry in microelectronics-related areas. The facility and its equipment are used by various research groups at Minnesota for work in areas such as compound semiconductor growth, optoelectronics, germanium-silicon, sensors, micromechanics, as well as standard silicon processing. Education centers around several silicon processing courses in the Electrical Engineering Department offered at the advanced undergraduate level. External activities involving other universities and industry usually consist of joint research projects or service for fee work.

AB - The Microelectronics Laboratory for Research and Education (MLRE) at the University of Minnesota is a class 10 semiconductor fabrication facility dedicated to supporting university research and education, as well as collaborating with other universities and industry in microelectronics-related areas. The facility and its equipment are used by various research groups at Minnesota for work in areas such as compound semiconductor growth, optoelectronics, germanium-silicon, sensors, micromechanics, as well as standard silicon processing. Education centers around several silicon processing courses in the Electrical Engineering Department offered at the advanced undergraduate level. External activities involving other universities and industry usually consist of joint research projects or service for fee work.

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UR - http://www.scopus.com/inward/citedby.url?scp=0027189498&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0027189498

SN - 078030991X

T3 - 1993 University/Government/Industry Microelectronics Symposium

SP - 170

EP - 173

BT - 1993 University/Government/Industry Microelectronics Symposium

PB - Publ by IEEE

T2 - Proceedings of the Tenth Biennial University/Government/Industry Microelectronics Symposium

Y2 - 18 May 1993 through 19 May 1993

ER -

Microelectronics at the University of Minnesota

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