Ferroelectric thin films have been integrated with silicon-based microelectromechanical systems, commonly called MEMS. Several thin films of the PZT family have been used in the formation of both microsensors and microactuators in processes compatible with silicon nitride, surface-micromachined, membranes and analog CMOS technology. Back-end micromachining of MEMS structures based on PZTtype electroceramic thin films is described. Several ferroelectric MEMS examples are described including 1) cantilever beam micro-accelerometer, 2) acoustic pressure sensor, 3) uncooled pyroelectric infrared imaging array, 2) integrated acoustic sensor, 4) micro-positioner, and 5) simple cantilever flap actuators. Major issues of merging technologies with ferroelectric thin films with microelectromechanical structures and on-chip electronics are described.
|Original language||English (US)|
|Number of pages||17|
|Journal||Proceedings of SPIE - The International Society for Optical Engineering|
|State||Published - Oct 21 1994|
|Event||Integrated Optics and Microstructures II 1994 - San Diego, United States|
Duration: Jul 24 1994 → Jul 29 1994