Micro tactile sesors with a suspeded and oriented single walled carbon nanotube beam embeded in PDMS elastomer

M. Lu, D. Lee, T. Yeom, T. Cui

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

A tactile sensor utilizing a patterned and suspended SWNT film as a sensing element is reported in this paper. Dense and oriented SWNT films were self-assembled using dielectrophoresis through the monitoring of the dc resistance of the film. The SWNT film was patterned by lithography and oxygen plasma etching to form a suspended SWNT beam. PDMS primer was spin-coated on the SWNT structure, and cured to realize a robust tactile sensor. In nanoindentation test, a piezoresistive sensitivity of 5%/mN and a detection limitation of 2 μN were demonstrated. This simple and low temperature fabrication technology is believed to be very promising for flexible tactile sensors and sensor arrays in applications to smart robots, implantable clinic tools, or embedded pressure sensors in microfluidic systems.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages457-460
Number of pages4
DOIs
StatePublished - Dec 11 2009
EventTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems - Denver, CO, United States
Duration: Jun 21 2009Jun 25 2009

Publication series

NameTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems

Other

OtherTRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems
CountryUnited States
CityDenver, CO
Period6/21/096/25/09

Keywords

  • Carbon nanotube
  • PDMS
  • Tactile sensor

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