Micro field in MEMS actuators

T. H. Cui, Z. Y. Zhou

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

Micro field is a new basic concept which can be used to analyze the actuation mechanism of MEMS(Micro Electro Mechanical Systems) actuators. First, the basic concept of micro field and fundamental principle of micro Extended Rayleigh Wave field have been put forward. Then, the micro field has been used to analyze the intrinsic quality of two kinds of microactuators, which include a piezoelectric micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments.

Original languageEnglish (US)
Title of host publicationProceedings of the International Symposium on Micro Machine and Human Science
Editors Anon
PublisherIEEE
Pages105-109
Number of pages5
StatePublished - Dec 1 1996
EventProceedings of the 1996 7th International Symposium on Micro Machine and Human Science, MHS'96 - Nagoya, Jpn
Duration: Oct 2 1996Oct 4 1996

Other

OtherProceedings of the 1996 7th International Symposium on Micro Machine and Human Science, MHS'96
CityNagoya, Jpn
Period10/2/9610/4/96

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    Cui, T. H., & Zhou, Z. Y. (1996). Micro field in MEMS actuators. In Anon (Ed.), Proceedings of the International Symposium on Micro Machine and Human Science (pp. 105-109). IEEE.