Abstract
Micro field is a new basic concept which can be used to analyze the actuation mechanism of MEMS(Micro Electro Mechanical Systems) actuators. First, the basic concept of micro field and fundamental principle of micro Extended Rayleigh Wave field have been put forward. Then, the micro field has been used to analyze the intrinsic quality of two kinds of microactuators, which include a piezoelectric micropump and a piezoelectric micromotor as typical examples. Finally, a new kind of piezoelectric micromotor model has been fabricated to carry out experiments.
| Original language | English (US) |
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| Title of host publication | Proceedings of the International Symposium on Micro Machine and Human Science |
| Editors | Anon |
| Publisher | IEEE |
| Pages | 105-109 |
| Number of pages | 5 |
| State | Published - Dec 1 1996 |
| Event | Proceedings of the 1996 7th International Symposium on Micro Machine and Human Science, MHS'96 - Nagoya, Jpn Duration: Oct 2 1996 → Oct 4 1996 |
Other
| Other | Proceedings of the 1996 7th International Symposium on Micro Machine and Human Science, MHS'96 |
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| City | Nagoya, Jpn |
| Period | 10/2/96 → 10/4/96 |