Micro catalytic methane sensors based on 3D quartz structures with cone-shaped cavities etched by high-resolution abrasive sand blasting

Keyphrases

• High-resolution 100%
• Silica 100%
• Sensor-based 100%
• Sandblasting 100%
• Abrasive 100%
• Cone-shaped 100%
• Methane Sensor 100%
• Quartz Substrate 66%
• Methane 33%
• Metal Catalyst 33%
• Environmental Applications 33%
• Fabrication Methods 33%
• High Correlation 33%
• Correlation Coefficient 33%
• Highly Uniform 33%
• Power Consumption 33%
• Microcavity 33%
• Mass Production 33%
• Sensor Performance 33%
• Porous Alumina 33%
• Blasting Technique 33%
• Silicon-based 33%
• Screen Printing 33%
• Inkjet Printing 33%
• Position Accuracy 33%
• High-performance Sensor 33%
• Co Metal 33%
• Low Thermal Mass 33%
• High Temperature Operation 33%
• Membrane Sensor 33%
• Sensor Temperature 33%
• Mechanical Shock 33%
• Combustible Gas 33%
• Catalytic Sensor 33%
• Substrate Sensor 33%
• Thermal Response Time 33%
• Temperature Distribution Profile 33%

Engineering

• High Resolution 100%
• Methane 100%
• Silicon Dioxide 100%
• Microelectromechanical System 25%
• Electric Power Utilization 25%
• Porous Alumina 25%
• Inkjet Printing 25%
• Combustible Gas 25%
• Response Time 25%
• Micro Cavity 25%
• Excellent Resistance 25%
• Mass Production 25%
• Temperature Distribution 25%
• Mechanical Shock 25%

Material Science

• Silicon 100%
• Microelectromechanical System 100%
• Thermal Sensor 100%
• Aluminum Oxide 100%