Micro catalytic methane sensor on bulk quartz substrate

Wenshuai Lu; Gaoshan Jing; Xiaomeng Bian; Tianhong Cui

doi:10.1109/TRANSDUCERS.2015.7181219

Micro catalytic methane sensor on bulk quartz substrate

Wenshuai Lu
, Gaoshan Jing
, Xiaomeng Bian
, Tianhong Cui

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

4 Scopus citations

Abstract

A micro catalytic methane sensor was designed and fabricated on a bulk quartz substrate for the first time to reduce power consumption of the sensor. This sensor was designed using finite element method (FEM) and fabricated on a bulk quartz substrate by two simple MEMS processes, lift off and high resolution screen printing. Local working temperature of the sensor can reach 550°C. Sensitivity of the sensor increases with temperatures changing from 250°C to 470°C, and the highest is 1.52 mV/vol. % CH₄. At 300°C, sensitivity of this sensor is 0.77 mV / vol. % CH₄ and power consumption of the pellistor pair is about 415 mW.

Original language	English (US)
Title of host publication	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1495-1498
Number of pages	4
ISBN (Electronic)	9781479989553
DOIs	https://doi.org/10.1109/TRANSDUCERS.2015.7181219
State	Published - Aug 5 2015
Event	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: Jun 21 2015 → Jun 25 2015

Publication series

Name	2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Other

Other	18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/Territory	United States
City	Anchorage
Period	6/21/15 → 6/25/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

Micro catalytic methane sensor
bulk quartz substrate
screen printing
sensitivity

Publisher link

10.1109/TRANSDUCERS.2015.7181219

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Lu, W., Jing, G., Bian, X., & Cui, T. (2015). Micro catalytic methane sensor on bulk quartz substrate. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 (pp. 1495-1498). Article 7181219 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2015.7181219

Micro catalytic methane sensor on bulk quartz substrate. / Lu, Wenshuai; Jing, Gaoshan; Bian, Xiaomeng et al.
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. p. 1495-1498 7181219 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Lu, W, Jing, G, Bian, X & Cui, T 2015, Micro catalytic methane sensor on bulk quartz substrate. in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015., 7181219, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers Inc., pp. 1495-1498, 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Anchorage, United States, 6/21/15. https://doi.org/10.1109/TRANSDUCERS.2015.7181219

Lu W, Jing G, Bian X, Cui T. Micro catalytic methane sensor on bulk quartz substrate. In 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc. 2015. p. 1495-1498. 7181219. (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015). doi: 10.1109/TRANSDUCERS.2015.7181219

Lu, Wenshuai ; Jing, Gaoshan ; Bian, Xiaomeng et al. / Micro catalytic methane sensor on bulk quartz substrate. 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 1495-1498 (2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015).

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abstract = "A micro catalytic methane sensor was designed and fabricated on a bulk quartz substrate for the first time to reduce power consumption of the sensor. This sensor was designed using finite element method (FEM) and fabricated on a bulk quartz substrate by two simple MEMS processes, lift off and high resolution screen printing. Local working temperature of the sensor can reach 550°C. Sensitivity of the sensor increases with temperatures changing from 250°C to 470°C, and the highest is 1.52 mV/vol. \% CH4. At 300°C, sensitivity of this sensor is 0.77 mV / vol. \% CH4 and power consumption of the pellistor pair is about 415 mW.",

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N2 - A micro catalytic methane sensor was designed and fabricated on a bulk quartz substrate for the first time to reduce power consumption of the sensor. This sensor was designed using finite element method (FEM) and fabricated on a bulk quartz substrate by two simple MEMS processes, lift off and high resolution screen printing. Local working temperature of the sensor can reach 550°C. Sensitivity of the sensor increases with temperatures changing from 250°C to 470°C, and the highest is 1.52 mV/vol. % CH4. At 300°C, sensitivity of this sensor is 0.77 mV / vol. % CH4 and power consumption of the pellistor pair is about 415 mW.

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Micro catalytic methane sensor on bulk quartz substrate

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