Abstract
A micro catalytic methane sensor was designed and fabricated on a bulk quartz substrate for the first time to reduce power consumption of the sensor. This sensor was designed using finite element method (FEM) and fabricated on a bulk quartz substrate by two simple MEMS processes, lift off and high resolution screen printing. Local working temperature of the sensor can reach 550°C. Sensitivity of the sensor increases with temperatures changing from 250°C to 470°C, and the highest is 1.52 mV/vol. % CH4. At 300°C, sensitivity of this sensor is 0.77 mV / vol. % CH4 and power consumption of the pellistor pair is about 415 mW.
Original language | English (US) |
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Title of host publication | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Pages | 1495-1498 |
Number of pages | 4 |
ISBN (Electronic) | 9781479989553 |
DOIs | |
State | Published - Aug 5 2015 |
Event | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States Duration: Jun 21 2015 → Jun 25 2015 |
Publication series
Name | 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 |
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Other
Other | 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 |
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Country/Territory | United States |
City | Anchorage |
Period | 6/21/15 → 6/25/15 |
Bibliographical note
Publisher Copyright:© 2015 IEEE.
Keywords
- Micro catalytic methane sensor
- bulk quartz substrate
- screen printing
- sensitivity