@inproceedings{b0d1b7cdb5c74508b91a914ad00667be,
title = "Micro catalytic methane sensor on bulk quartz substrate",
abstract = "A micro catalytic methane sensor was designed and fabricated on a bulk quartz substrate for the first time to reduce power consumption of the sensor. This sensor was designed using finite element method (FEM) and fabricated on a bulk quartz substrate by two simple MEMS processes, lift off and high resolution screen printing. Local working temperature of the sensor can reach 550°C. Sensitivity of the sensor increases with temperatures changing from 250°C to 470°C, and the highest is 1.52 mV/vol. % CH4. At 300°C, sensitivity of this sensor is 0.77 mV / vol. % CH4 and power consumption of the pellistor pair is about 415 mW.",
keywords = "Micro catalytic methane sensor, bulk quartz substrate, screen printing, sensitivity",
author = "Wenshuai Lu and Gaoshan Jing and Xiaomeng Bian and Tianhong Cui",
year = "2015",
month = aug,
day = "5",
doi = "10.1109/TRANSDUCERS.2015.7181219",
language = "English (US)",
series = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1495--1498",
booktitle = "2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015",
note = "18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
}