MEMS FOR INTEGRATED DIAGNOSTIC APPLICATIONS

D. Polla; Lorraine F Francis; W. Robbins; R. Harjani

doi:10.1115/IMECE1997-1266

MEMS FOR INTEGRATED DIAGNOSTIC APPLICATIONS

D. Polla, Lorraine F Francis, W. Robbins, R. Harjani

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Microelectromechanical Systems (MEMS) technology is currently being applied to the structural health monitoring of critical aircraft components. The approach integrates acoustic emission (AE) and vibration monitoring devices with signal processing electronics to provide real-time indicators of incipient failure of aircraft (helicopter) components with a known history of catastrophic failure due to fracture. This paper describes MEMS-based sensor development, piezoelectric microsensor design and fabrication, and signal processing approaches directed toward the realization of inexpensive, multiple, MEMS-based integrated diagnostics “coupons”. Initial feasibility data are presented.

Original language	English (US)
Title of host publication	Emerging Technologies for Machinery Health Monitoring and Prognosis
Publisher	American Society of Mechanical Engineers (ASME)
Pages	19-24
Number of pages	6
ISBN (Electronic)	9780791818268
DOIs	https://doi.org/10.1115/IMECE1997-1266
State	Published - 1997
Event	ASME 1997 International Mechanical Engineering Congress and Exposition, IMECE 1997 - Dallas, United States Duration: Nov 16 1997 → Nov 21 1997

Publication series

Name	ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
Volume	1997-AH

Conference

Conference	ASME 1997 International Mechanical Engineering Congress and Exposition, IMECE 1997
Country/Territory	United States
City	Dallas
Period	11/16/97 → 11/21/97

Bibliographical note

Publisher Copyright:
© 1997 American Society of Mechanical Engineers (ASME). All rights reserved.

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10.1115/IMECE1997-1266

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Polla, D., Francis, L. F., Robbins, W., & Harjani, R. (1997). MEMS FOR INTEGRATED DIAGNOSTIC APPLICATIONS. In Emerging Technologies for Machinery Health Monitoring and Prognosis (pp. 19-24). (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 1997-AH). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE1997-1266

MEMS FOR INTEGRATED DIAGNOSTIC APPLICATIONS. / Polla, D.; Francis, Lorraine F ; Robbins, W. et al.
Emerging Technologies for Machinery Health Monitoring and Prognosis. American Society of Mechanical Engineers (ASME), 1997. p. 19-24 (ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE); Vol. 1997-AH).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Polla, D, Francis, LF , Robbins, W & Harjani, R 1997, MEMS FOR INTEGRATED DIAGNOSTIC APPLICATIONS. in Emerging Technologies for Machinery Health Monitoring and Prognosis. ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 1997-AH, American Society of Mechanical Engineers (ASME), pp. 19-24, ASME 1997 International Mechanical Engineering Congress and Exposition, IMECE 1997, Dallas, United States, 11/16/97. https://doi.org/10.1115/IMECE1997-1266

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MEMS FOR INTEGRATED DIAGNOSTIC APPLICATIONS

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