Mechanism and energetics of dissociative adsorption of SiH3 on the hydrogen-terminated Si (0 0 1) -( 2×1 ) surface

  • Stephen P. Walch
  • , Shyam Ramalingam
  • , Eray S. Aydil
  • , Dimitrios Maroudas

Research output: Contribution to journal › Article › peer-review

32 Scopus citations

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Chemistry

Chemical Engineering