Mechanical properties of wear tested LIGA nickel

N. R. Moody, J. M. Jungk, M. S. Kennedy, S. V. Prasad, D. F. Bahr, William W Gerberich

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations


Strength, friction, and wear are dominant factors in the performance and reliability of materials and devices fabricated using nickel based LIGA and silicon based MEMS technologies. However, the effects of frictional contacts and wear on the mechanical performance of microdevices are not well-defined. To address these effects on performance of LIGA nickel, we have begun a program employing nanoscratch and nanoindentation. Nanoscratch techniques were used to generate wear patterns using loads of 100, 200, 500, and 990 μN with each load applied for 1, 2, 5, and 10 passes. Nanoindentation was then used to measure properties in each wear pattern correcting for surface roughness. The results showed a systematic increase in hardness with applied load and number of nanoscratch passes. The results also showed that the work hardening coefficient determined from indentation tests within wear patterns follows the work hardening behavior established from tensile tests, supporting use of a nanomechanics-based approach for studying mechanical properties of wear tested material.

Original languageEnglish (US)
Article numberR7.8
Pages (from-to)241-246
Number of pages6
JournalMaterials Research Society Symposium Proceedings
StatePublished - Aug 25 2005
Event2004 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 29 2004Dec 3 2004


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