Mechanical design of thermally invariant mirrors coated by atomic layer deposition

Nicholas T. Gabriel, Sangho S. Kim, Joseph J. Talghader

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Thermal expansion mismatch between the layers of an optical coating and its substrate can cause changes in the shape of a mirror or optical element. It is shown that with knowledge of the linear stress-temperature relationship for each film, one can design coatings to have a specific thermal deformation characteristic, although the requirements for thin film repeatability are high. Such coatings are demonstrated using atomic layer deposition (ALD), and thermally invariant ALD coatings are investigated through optomechanical simulation.

Original languageEnglish (US)
Title of host publicationOptical Interference Coatings, OIC 2010
StatePublished - Dec 1 2010
EventOptical Interference Coatings, OIC 2010 - Tucson, AZ, United States
Duration: Jun 6 2010Jun 11 2010

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


OtherOptical Interference Coatings, OIC 2010
Country/TerritoryUnited States
CityTucson, AZ


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