@inproceedings{56ba8a5f90ba46b9a57eab1f290de526,
title = "Measuring unresolved surface features using imaging ellipsometric polarization signatures",
author = "Qiwen Zhan and Leger, {James R.}",
year = "2002",
language = "English (US)",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Diffractive Optics and Micro-Optics, DOMO 2002",
note = "Diffractive Optics and Micro-Optics, DOMO 2002 ; Conference date: 03-06-2002 Through 06-06-2002",
}