Measuring unresolved surface features using imaging ellipsometric polarization signatures

Qiwen Zhan, James R. Leger

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationDiffractive Optics and Micro-Optics, DOMO 2002
PublisherOptica Publishing Group (formerly OSA)
ISBN (Electronic)1557527105
StatePublished - 2002
EventDiffractive Optics and Micro-Optics, DOMO 2002 - Tucson, United States
Duration: Jun 3 2002Jun 6 2002

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceDiffractive Optics and Micro-Optics, DOMO 2002
Country/TerritoryUnited States
CityTucson
Period6/3/026/6/02

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