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Measurement of Sputtering Yields and Ion Beam Damage to Organic Thin Films with the Quartz Crystal Microbalance
Dale M. Ullevig, John F Evans
Chemistry & Biochemistry
Research output
:
Contribution to journal
›
Article
›
peer-review
34
Scopus citations
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Dive into the research topics of 'Measurement of Sputtering Yields and Ion Beam Damage to Organic Thin Films with the Quartz Crystal Microbalance'. Together they form a unique fingerprint.
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Keyphrases
Organic Thin Films
100%
Quartz Crystal Microbalance with Dissipation (QCM-D)
100%
Sputtering Yield
100%
Ion Beam Damage
100%
Argon Ions
66%
Polystyrene
33%
Poly(methyl methacrylate)
33%
Polymer Film
33%
Overlayer
33%
Dip Coating
33%
Ion Beam
33%
Silver Film
33%
Experimental Arrangement
33%
Quartz Crystal
33%
Sputtering Rate
33%
Damage Cross-section
33%
Engineering
Quartz Crystal Microbalance
100%
Sputtering Yield
100%
Thin Films
100%
Deposited Film
33%
Cross Section
33%
Quartz Crystal
33%
Chemistry
Argon Ion
100%
Ion Beam
100%
Metallocene
50%
Silver
50%
Material Science
Thin Films
100%
Film
33%
Polystyrene
33%
Silver
33%
Polymer Films
33%
Chemical Engineering
Film
100%
Organometallics
25%
Polystyrene
25%