Measurement of air pollution acidic gases in a class 10 cleanroom

Wai S. Poon; David Y.H. Pui; Benjamin Y.H. Liu; Jung sung Hwang

Measurement of air pollution acidic gases in a class 10 cleanroom

Wai S. Poon, David Y.H. Pui, Benjamin Y.H. Liu, Jung sung Hwang

Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

The concentrations of gaseous inorganic acidic air pollutants (HNO₂, SO₂) inside a class 10 cleanroom were measured in winter and summer by denuder method. The results were compared to those found in the ambient air. It was found that the concentration of HNO₂ inside the cleanroom ranged from 0.10 ppb to 0.61 ppb in summer and winter. The concentration of the SO₂ inside the cleanroom ranged from 0.85 to 2.93 ppb in winter, and 0.04 to 0.15 ppb in summer. The concentration of HNO₂ in the ambient air was comparable to that measured in cleanroom. No SO₂ was measured in the cleanroom in summer. The cause is believed to be due to the removal of SO₂ in the ventilation system.

Original language	English (US)
Pages (from-to)	384-389
Number of pages	6
Journal	Institute of Environmental Sciences - Proceedings, Annual Technical Meeting
State	Published - Dec 1 1995
Event	Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences - Anaheim, CA, USA Duration: Apr 30 1995 → May 5 1995

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title = "Measurement of air pollution acidic gases in a class 10 cleanroom",

abstract = "The concentrations of gaseous inorganic acidic air pollutants (HNO2, SO2) inside a class 10 cleanroom were measured in winter and summer by denuder method. The results were compared to those found in the ambient air. It was found that the concentration of HNO2 inside the cleanroom ranged from 0.10 ppb to 0.61 ppb in summer and winter. The concentration of the SO2 inside the cleanroom ranged from 0.85 to 2.93 ppb in winter, and 0.04 to 0.15 ppb in summer. The concentration of HNO2 in the ambient air was comparable to that measured in cleanroom. No SO2 was measured in the cleanroom in summer. The cause is believed to be due to the removal of SO2 in the ventilation system.",

author = "Poon, {Wai S.} and Pui, {David Y.H.} and Liu, {Benjamin Y.H.} and Hwang, {Jung sung}",

year = "1995",

month = dec,

day = "1",

language = "English (US)",

pages = "384--389",

journal = "Institute of Environmental Sciences - Proceedings, Annual Technical Meeting",

issn = "0073-9227",

note = "Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences ; Conference date: 30-04-1995 Through 05-05-1995",

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TY - JOUR

T1 - Measurement of air pollution acidic gases in a class 10 cleanroom

AU - Poon, Wai S.

AU - Pui, David Y.H.

AU - Liu, Benjamin Y.H.

AU - Hwang, Jung sung

PY - 1995/12/1

Y1 - 1995/12/1

N2 - The concentrations of gaseous inorganic acidic air pollutants (HNO2, SO2) inside a class 10 cleanroom were measured in winter and summer by denuder method. The results were compared to those found in the ambient air. It was found that the concentration of HNO2 inside the cleanroom ranged from 0.10 ppb to 0.61 ppb in summer and winter. The concentration of the SO2 inside the cleanroom ranged from 0.85 to 2.93 ppb in winter, and 0.04 to 0.15 ppb in summer. The concentration of HNO2 in the ambient air was comparable to that measured in cleanroom. No SO2 was measured in the cleanroom in summer. The cause is believed to be due to the removal of SO2 in the ventilation system.

AB - The concentrations of gaseous inorganic acidic air pollutants (HNO2, SO2) inside a class 10 cleanroom were measured in winter and summer by denuder method. The results were compared to those found in the ambient air. It was found that the concentration of HNO2 inside the cleanroom ranged from 0.10 ppb to 0.61 ppb in summer and winter. The concentration of the SO2 inside the cleanroom ranged from 0.85 to 2.93 ppb in winter, and 0.04 to 0.15 ppb in summer. The concentration of HNO2 in the ambient air was comparable to that measured in cleanroom. No SO2 was measured in the cleanroom in summer. The cause is believed to be due to the removal of SO2 in the ventilation system.

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M3 - Conference article

AN - SCOPUS:0029482394

SP - 384

EP - 389

JO - Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

JF - Institute of Environmental Sciences - Proceedings, Annual Technical Meeting

SN - 0073-9227

T2 - Proceedings of the 41st Annual Technical Meeting of the Institute of Environmental Sciences

Y2 - 30 April 1995 through 5 May 1995

ER -

Measurement of air pollution acidic gases in a class 10 cleanroom

Abstract

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