Materials Research Society Symposium - Proceedings: Preface

S. A. Campbell, L. A. Clevenger, P. B. Griffin, C. C. Hobbs

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Pages (from-to)	xi
Journal	Materials Research Society Symposium - Proceedings
Volume	670
State	Published - 2001
Event	Gate Stack and Silicide Issues in Silicon Processing II - San Francisco, CA, United States Duration: Apr 17 2001 → Apr 19 2001

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title = "Materials Research Society Symposium - Proceedings: Preface",

author = "Campbell, {S. A.} and Clevenger, {L. A.} and Griffin, {P. B.} and Hobbs, {C. C.}",

year = "2001",

language = "English (US)",

volume = "670",

pages = "xi",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Gate Stack and Silicide Issues in Silicon Processing II ; Conference date: 17-04-2001 Through 19-04-2001",

}

TY - JOUR

T1 - Materials Research Society Symposium - Proceedings

T2 - Gate Stack and Silicide Issues in Silicon Processing II

AU - Campbell, S. A.

AU - Clevenger, L. A.

AU - Griffin, P. B.

AU - Hobbs, C. C.

PY - 2001

Y1 - 2001

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M3 - Conference article

AN - SCOPUS:0035557068

SN - 0272-9172

VL - 670

SP - xi

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

Y2 - 17 April 2001 through 19 April 2001

ER -