Mass-transport fabrication of off-axis and prismatic gallium phosphide optics

Todd A. Ballen; James R Leger

doi:10.1364/AO.38.002979

Mass-transport fabrication of off-axis and prismatic gallium phosphide optics

Todd A. Ballen, James R Leger

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

6 Scopus citations

Abstract

Refractive prismatic and off-axis micro-optical elements have been fabricated in gallium phosphide by mass-transport smoothing of multistep and binary preforms, respectively. A total optical efficiency of greater than 94% was measured for the prism, while diffraction-limited collimation and steering were demonstrated with the off-axis lens. A qualitative discussion of possible errors in binary preform etching and their effects on the surface figure is also included.

Original language	English (US)
Pages (from-to)	2979-3985
Number of pages	1007
Journal	Applied Optics
Volume	38
Issue number	14
DOIs	https://doi.org/10.1364/AO.38.002979
State	Published - May 10 1999

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10.1364/AO.38.002979

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abstract = "Refractive prismatic and off-axis micro-optical elements have been fabricated in gallium phosphide by mass-transport smoothing of multistep and binary preforms, respectively. A total optical efficiency of greater than 94% was measured for the prism, while diffraction-limited collimation and steering were demonstrated with the off-axis lens. A qualitative discussion of possible errors in binary preform etching and their effects on the surface figure is also included.",

author = "Ballen, {Todd A.} and Leger, {James R}",

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Mass-transport fabrication of off-axis and prismatic gallium phosphide optics

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