Mass-transport fabrication of off-axis and prismatic gallium phosphide optics

Todd A. Ballen, James R Leger

Research output: Contribution to journalArticlepeer-review

7 Scopus citations


Refractive prismatic and off-axis micro-optical elements have been fabricated in gallium phosphide by mass-transport smoothing of multistep and binary preforms, respectively. A total optical efficiency of greater than 94% was measured for the prism, while diffraction-limited collimation and steering were demonstrated with the off-axis lens. A qualitative discussion of possible errors in binary preform etching and their effects on the surface figure is also included.

Original languageEnglish (US)
Pages (from-to)2979-3985
Number of pages1007
JournalApplied Optics
Issue number14
StatePublished - May 10 1999


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