Mass spectrometric and ion energy diagnostics in the study of plasma etching and polymerization

L. M. Ferreiro; D. W. Ernie; J. F. Evans

doi:10.1116/1.574435

Mass spectrometric and ion energy diagnostics in the study of plasma etching and polymerization

L. M. Ferreiro
, D. W. Ernie
, J. F. Evans

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	2280-2284
Number of pages	5
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	5
Issue number	4
DOIs	https://doi.org/10.1116/1.574435
State	Published - Jul 1 1987

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10.1116/1.574435

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title = "Mass spectrometric and ion energy diagnostics in the study of plasma etching and polymerization",

author = "Ferreiro, \{L. M.\} and Ernie, \{D. W.\} and Evans, \{J. F.\}",

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AU - Ernie, D. W.

AU - Evans, J. F.

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JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

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Mass spectrometric and ion energy diagnostics in the study of plasma etching and polymerization

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