Mass spectrometric and ion energy diagnostics in the study of plasma etching and polymerization

L. M. Ferreiro, D. W. Ernie, J. F. Evans

Research output: Contribution to journalArticlepeer-review

13 Scopus citations
Original languageEnglish (US)
Pages (from-to)2280-2284
Number of pages5
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Issue number4
StatePublished - Jul 1 1987

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