M-Test Method for Measuring Mechanical Property of Multi-layer in MEMS

Yan Feng Jiang, Qing An Huang

Research output: Contribution to journalArticle

Abstract

In this paper, an altered M-TEST method is adopted, which can be used to measure multi-layer's mechanical properties, such as residual stress and Young's modulus. Double cantilever beam specimens with different stiffness are included in the measuring structure. They can be treated as an equal-effective single layer with measurable effective mechanical properties. Using the different stiffness cantilevers, the properties of each layer in the compound layer can be extracted with some mathematical operation. The design method is shown in this paper, including effect of fringe effect and shear stress. A practical application with this method is applied and the reasonability can be demonstrated.

Original languageEnglish (US)
Pages (from-to)631-634
Number of pages4
JournalInternational Journal of Nonlinear Sciences and Numerical Simulation
Volume3
Issue number3-4
DOIs
StatePublished - Jan 1 2002

Keywords

  • M-Test
  • Multi-layer
  • Young's modulus

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