Low temperature CVD of crystalline titanium dioxide films using tetranitratotitanium(IV)

David C. Gilmer, Daniel G. Colombo, Charles J. Taylor, Jeff Roberts, Greg Haugstad, Stephen A. Campbell, Hyeon Seag Kim, Glen D. Wilk, Michael A. Gribelyuk, Wayne L. Gladfelter

Research output: Contribution to journalArticlepeer-review

71 Scopus citations
Original languageEnglish (US)
Pages (from-to)9-11
Number of pages3
JournalAdvanced Materials
Volume10
Issue number1
StatePublished - Jan 2 1998

Cite this