Low temperature CVD of crystalline titanium dioxide films using tetranitratotitanium(IV)

David C. Gilmer; Daniel G. Colombo; Charles J. Taylor; Jeff Roberts; Greg Haugstad; Stephen A. Campbell; Hyeon Seag Kim; Glen D. Wilk; Michael A. Gribelyuk; Wayne L. Gladfelter

doi:10.1002/(sici)1521-3862(199801)04:01<9::aid-cvde9>3.3.co;2-v

Low temperature CVD of crystalline titanium dioxide films using tetranitratotitanium(IV)

David C. Gilmer, Daniel G. Colombo, Charles J. Taylor, Jeff Roberts, Greg Haugstad, Stephen A. Campbell, Hyeon Seag Kim, Glen D. Wilk, Michael A. Gribelyuk, Wayne L. Gladfelter

Research output: Contribution to journal › Article › peer-review

71 Scopus citations

Original language	English (US)
Pages (from-to)	9-11
Number of pages	3
Journal	Advanced Materials
Volume	10
Issue number	1
DOIs	https://doi.org/10.1002/(sici)1521-3862(199801)04:01<9::aid-cvde9>3.3.co;2-v
State	Published - Jan 2 1998

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10.1002/(sici)1521-3862(199801)04:01<9::aid-cvde9>3.3.co;2-v

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@article{4c05e6d2dd7f4250ace287b43529cbe5,

title = "Low temperature CVD of crystalline titanium dioxide films using tetranitratotitanium(IV)",

author = "Gilmer, {David C.} and Colombo, {Daniel G.} and Taylor, {Charles J.} and Jeff Roberts and Greg Haugstad and Campbell, {Stephen A.} and Kim, {Hyeon Seag} and Wilk, {Glen D.} and Gribelyuk, {Michael A.} and Gladfelter, {Wayne L.}",

year = "1998",

month = jan,

day = "2",

doi = "10.1002/(sici)1521-3862(199801)04:01<9::aid-cvde9>3.3.co;2-v",

language = "English (US)",

volume = "10",

pages = "9--11",

journal = "Advanced Materials",

issn = "0935-9648",

publisher = "Wiley-Blackwell",

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TY - JOUR

T1 - Low temperature CVD of crystalline titanium dioxide films using tetranitratotitanium(IV)

AU - Gilmer, David C.

AU - Colombo, Daniel G.

AU - Taylor, Charles J.

AU - Roberts, Jeff

AU - Haugstad, Greg

AU - Campbell, Stephen A.

AU - Kim, Hyeon Seag

AU - Wilk, Glen D.

AU - Gribelyuk, Michael A.

AU - Gladfelter, Wayne L.

PY - 1998/1/2

Y1 - 1998/1/2

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UR - http://www.scopus.com/inward/citedby.url?scp=0032472122&partnerID=8YFLogxK

U2 - 10.1002/(sici)1521-3862(199801)04:01<9::aid-cvde9>3.3.co;2-v

DO - 10.1002/(sici)1521-3862(199801)04:01<9::aid-cvde9>3.3.co;2-v

M3 - Article

AN - SCOPUS:0032472122

SN - 0935-9648

VL - 10

SP - 9

EP - 11

JO - Advanced Materials

JF - Advanced Materials

IS - 1

ER -

Low temperature CVD of crystalline titanium dioxide films using tetranitratotitanium(IV)

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