Low-Temperature Co-Fired Unipoled Multilayer Piezoelectric Transformers

Xiangyu Gao, Yongke Yan, Alfredo Vazquez Carazo, Shuxiang Dong, Shashank Priya

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22 Scopus citations

Abstract

The reliability of piezoelectric transformers (PTs) is dependent upon the quality of fabrication technique as any heterogeneity, prestress, or misalignment can lead to spurious response. In this paper, unipoled multilayer PTs were investigated focusing on high-power composition and co-firing profile in order to provide low-temperature synthesized high-quality device measured in terms of efficiency and power density. The addition of 0.2 wt% CuO into Pb0.98Sr0.02(Mg1/3Nb2/3)0.06(Mn1/3Nb2/3)0.06(Zr0.48Ti0.52)0.88O3 (PMMnN-PZT) reduces the co-firing temperature from 1240 °C to 930 °C, which allows the use of Ag/Pd inner electrode instead of noble Pt inner electrode. Low-temperature synthesized material was found to exhibit excellent piezoelectric properties (Qm = 1300, kp= 0.47, tan δ = 0.4 %, d33 = 218 pC/N, and Tc= 325 °C). The performance of the PT co-fired with Ag/Pd electrode at 930 °C was similar to that co-fired at 1240 °C with Pt electrode (25% reduction in sintering temperature). Both high- and low-temperature synthesized PTs demonstrated 5-W output power with >90% efficiency and 11.5 W/cm3 power density.

Original languageEnglish (US)
Pages (from-to)513-519
Number of pages7
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume65
Issue number3
DOIs
StatePublished - Mar 2018
Externally publishedYes

Bibliographical note

Funding Information:
Manuscript received April 11, 2017; accepted December 17, 2017. Date of publication December 20, 2017; date of current version March 1, 2018. This work was supported in part by the DARPA MATRIX Program and in part by the China Scholarship Council. (Corresponding authors: Yongke Yan; Alfredo Vazquez Carazo; Shuxiang Dong; Shashank Priya.) X. Gao is with the Department of Materials Science and Engineering, College of Engineering, Peking University, Beijing 100871, China, and also with the Center for Energy Harvesting Materials and Systems, Virginia Tech, Blacksburg, VA 24061 USA.

Publisher Copyright:
© 1986-2012 IEEE.

Keywords

  • Co-firing
  • low temperature
  • multilayer
  • piezoelectric transformer (PTs)
  • power density

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