Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems

Tianhong Cui, Y. Lvov, Feng Hua, Jingshi Shi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We report a lithographic approach to pattern multiple types of Layer-by-Layer self-assembled nanoparticle thin films. 150 nm and 64 nm polystyrene particles are separated in desired patterns with a feature size 5 to 20 microns. The process is quite simple, consisting of only two consecutive lift-offs, and there is no high requirement for the equipments. This method can be applied to various types of nanoparticles. Since it is based on the conventional lithographic technique, it provides a simple, reliable, and cheap method for complex microsystem fabrication which is composed mainly of functional nanoparticles for the applications to sensing and actuation in micro/nano scale.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages738-741
Number of pages4
ISBN (Electronic)0780377311, 9780780377318
DOIs
StatePublished - Jan 1 2003
Event12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers - Boston, United States
Duration: Jun 8 2003Jun 12 2003

Publication series

NameTRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers
Volume1

Conference

Conference12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers
CountryUnited States
CityBoston
Period6/8/036/12/03

Keywords

  • Adhesives
  • Biomedical optical imaging
  • Lithography
  • Nanoparticles
  • Optical device fabrication
  • Optical films
  • Optical sensors
  • Self-assembly
  • Silicon compounds
  • Transistors

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