@inproceedings{87b5ea9465e24bb5866a0495748c600a,
title = "Lithographic approach to pattern multiple nanoparticle thin films prepared by Layer-by-Layer self-assembly for microsystems",
abstract = "We report a lithographic approach to pattern multiple types of Layer-by-Layer self-assembled nanoparticle thin films. 150 nm and 64 nm polystyrene particles are separated in desired patterns with a feature size 5 to 20 microns. The process is quite simple, consisting of only two consecutive lift-offs, and there is no high requirement for the equipments. This method can be applied to various types of nanoparticles. Since it is based on the conventional lithographic technique, it provides a simple, reliable, and cheap method for complex microsystem fabrication which is composed mainly of functional nanoparticles for the applications to sensing and actuation in micro/nano scale.",
keywords = "Adhesives, Biomedical optical imaging, Lithography, Nanoparticles, Optical device fabrication, Optical films, Optical sensors, Self-assembly, Silicon compounds, Transistors",
author = "Tianhong Cui and Y. Lvov and Feng Hua and Jingshi Shi",
year = "2003",
month = jan,
day = "1",
doi = "10.1109/SENSOR.2003.1215579",
language = "English (US)",
series = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "738--741",
booktitle = "TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers",
note = "12th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2003 - Digest of Technical Papers ; Conference date: 08-06-2003 Through 12-06-2003",
}