Limitations and Importance of EM Models for On-wafer High Frequency Performance Evaluation

Nikita Mahjabeen, Yali Zhang, Aditya M Dave, Joseph Um, Allison N Harpel, Bethanie Stadler, Rhonda Franklin, Rashaunda Henderson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper introduces a new simple electromagnetic (EM) probe model to better account for the probe parasitics incurred when measuring on-wafer coplanar waveguide (CPW) lines up to 220 GHz. This is the first time the performance of CPW transmission lines on a silicon wafer have been studied with a traditional bridge model and the new bridge-probe model. The electric field study shows that the proposed new bridge-probe model better identifies the interference of the probe structure with the metal chuck and the multilayer measurement environment.

Original languageEnglish (US)
Title of host publication2022 IEEE/MTT-S International Microwave Symposium, IMS 2022
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages475-478
Number of pages4
ISBN (Electronic)9781665496131
DOIs
StatePublished - 2022
Event2022 IEEE/MTT-S International Microwave Symposium, IMS 2022 - Denver, United States
Duration: Jun 19 2022Jun 24 2022

Publication series

Name2022 IEEE/MTT-S International Microwave Symposium - IMS 2022

Conference

Conference2022 IEEE/MTT-S International Microwave Symposium, IMS 2022
Country/TerritoryUnited States
CityDenver
Period6/19/226/24/22

Bibliographical note

Funding Information:
This work was supported by the Semiconductor Research Corporation (SRC) via the GRC, Thrust NMP, Task 2874.001 at the Texas Analog Center of Excellence, University of Texas at Dallas with collaboration from University of Minnesota

Funding Information:
ACKNOWLEDGEMENT This work was supported by the Semiconductor Research Corporation (SRC) via the GRC, Thrust NMP, Task 2874.001 at the Texas Analog Center of Excellence, University of Texas at Dallas with collaboration from University of Minnesota. We appreciate the active collaborations with our liaisons at Intel, IBM, TEL and TSMC.

Publisher Copyright:
© 2022 IEEE.

Keywords

  • coplanar waveguide
  • electromagnetic (EM) simulation
  • on-wafer
  • probes
  • surface waves

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