Limitations and Importance of EM Models for On-wafer High Frequency Performance Evaluation

Nikita Mahjabeen; Yali Zhang; Aditya M Dave; Joseph Um; Allison N Harpel; Bethanie Stadler; Rhonda Franklin; Rashaunda Henderson

doi:10.1109/IMS37962.2022.9865328

Limitations and Importance of EM Models for On-wafer High Frequency Performance Evaluation

Nikita Mahjabeen, Yali Zhang, Aditya M Dave, Joseph Um, Allison N Harpel, Bethanie Stadler, Rhonda Franklin, Rashaunda Henderson

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Scopus citations

Abstract

This paper introduces a new simple electromagnetic (EM) probe model to better account for the probe parasitics incurred when measuring on-wafer coplanar waveguide (CPW) lines up to 220 GHz. This is the first time the performance of CPW transmission lines on a silicon wafer have been studied with a traditional bridge model and the new bridge-probe model. The electric field study shows that the proposed new bridge-probe model better identifies the interference of the probe structure with the metal chuck and the multilayer measurement environment.

Original language	English (US)
Title of host publication	2022 IEEE/MTT-S International Microwave Symposium, IMS 2022
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	475-478
Number of pages	4
ISBN (Electronic)	9781665496131
DOIs	https://doi.org/10.1109/IMS37962.2022.9865328
State	Published - 2022
Event	2022 IEEE/MTT-S International Microwave Symposium, IMS 2022 - Denver, United States Duration: Jun 19 2022 → Jun 24 2022

Publication series

Name	2022 IEEE/MTT-S International Microwave Symposium - IMS 2022

Conference

Conference	2022 IEEE/MTT-S International Microwave Symposium, IMS 2022
Country/Territory	United States
City	Denver
Period	6/19/22 → 6/24/22

Bibliographical note

Funding Information:
This work was supported by the Semiconductor Research Corporation (SRC) via the GRC, Thrust NMP, Task 2874.001 at the Texas Analog Center of Excellence, University of Texas at Dallas with collaboration from University of Minnesota

Funding Information:
ACKNOWLEDGEMENT This work was supported by the Semiconductor Research Corporation (SRC) via the GRC, Thrust NMP, Task 2874.001 at the Texas Analog Center of Excellence, University of Texas at Dallas with collaboration from University of Minnesota. We appreciate the active collaborations with our liaisons at Intel, IBM, TEL and TSMC.

Publisher Copyright:
© 2022 IEEE.

Keywords

coplanar waveguide
electromagnetic (EM) simulation
on-wafer
probes
surface waves

Publisher link

10.1109/IMS37962.2022.9865328

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Cite this

Mahjabeen, N., Zhang, Y., Dave, A. M., Um, J., Harpel, A. N., Stadler, B., Franklin, R., & Henderson, R. (2022). Limitations and Importance of EM Models for On-wafer High Frequency Performance Evaluation. In 2022 IEEE/MTT-S International Microwave Symposium, IMS 2022 (pp. 475-478). (2022 IEEE/MTT-S International Microwave Symposium - IMS 2022). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMS37962.2022.9865328

Limitations and Importance of EM Models for On-wafer High Frequency Performance Evaluation. / Mahjabeen, Nikita; Zhang, Yali; Dave, Aditya M et al.
2022 IEEE/MTT-S International Microwave Symposium, IMS 2022. Institute of Electrical and Electronics Engineers Inc., 2022. p. 475-478 (2022 IEEE/MTT-S International Microwave Symposium - IMS 2022).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Mahjabeen, N, Zhang, Y, Dave, AM, Um, J, Harpel, AN, Stadler, B , Franklin, R & Henderson, R 2022, Limitations and Importance of EM Models for On-wafer High Frequency Performance Evaluation. in 2022 IEEE/MTT-S International Microwave Symposium, IMS 2022. 2022 IEEE/MTT-S International Microwave Symposium - IMS 2022, Institute of Electrical and Electronics Engineers Inc., pp. 475-478, 2022 IEEE/MTT-S International Microwave Symposium, IMS 2022, Denver, United States, 6/19/22. https://doi.org/10.1109/IMS37962.2022.9865328

Mahjabeen N, Zhang Y, Dave AM, Um J, Harpel AN, Stadler B et al. Limitations and Importance of EM Models for On-wafer High Frequency Performance Evaluation. In 2022 IEEE/MTT-S International Microwave Symposium, IMS 2022. Institute of Electrical and Electronics Engineers Inc. 2022. p. 475-478. (2022 IEEE/MTT-S International Microwave Symposium - IMS 2022). doi: 10.1109/IMS37962.2022.9865328

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abstract = "This paper introduces a new simple electromagnetic (EM) probe model to better account for the probe parasitics incurred when measuring on-wafer coplanar waveguide (CPW) lines up to 220 GHz. This is the first time the performance of CPW transmission lines on a silicon wafer have been studied with a traditional bridge model and the new bridge-probe model. The electric field study shows that the proposed new bridge-probe model better identifies the interference of the probe structure with the metal chuck and the multilayer measurement environment.",

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author = "Nikita Mahjabeen and Yali Zhang and Dave, {Aditya M} and Joseph Um and Harpel, {Allison N} and Bethanie Stadler and Rhonda Franklin and Rashaunda Henderson",

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AU - Stadler, Bethanie

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AU - Henderson, Rashaunda

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N2 - This paper introduces a new simple electromagnetic (EM) probe model to better account for the probe parasitics incurred when measuring on-wafer coplanar waveguide (CPW) lines up to 220 GHz. This is the first time the performance of CPW transmission lines on a silicon wafer have been studied with a traditional bridge model and the new bridge-probe model. The electric field study shows that the proposed new bridge-probe model better identifies the interference of the probe structure with the metal chuck and the multilayer measurement environment.

AB - This paper introduces a new simple electromagnetic (EM) probe model to better account for the probe parasitics incurred when measuring on-wafer coplanar waveguide (CPW) lines up to 220 GHz. This is the first time the performance of CPW transmission lines on a silicon wafer have been studied with a traditional bridge model and the new bridge-probe model. The electric field study shows that the proposed new bridge-probe model better identifies the interference of the probe structure with the metal chuck and the multilayer measurement environment.

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KW - electromagnetic (EM) simulation

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Limitations and Importance of EM Models for On-wafer High Frequency Performance Evaluation

Abstract

Publication series

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Bibliographical note

Keywords

Publisher link

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