Laser-machined piezoelectric cantilevers for mechanical energy harvesting

Hyun Uk Kim, Vishwas Bedekar, Rashed Adnan Islam, Woo Ho Lee, Don Leo, Shashank Priya

Research output: Contribution to journalArticlepeer-review

42 Scopus citations

Abstract

In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s2). The device was found to generate continuous power of 1.13 μW at 870 Hz across a 288.5 kΩ load with a power density of 301.3 μW/cm3.

Original languageEnglish (US)
Article number4626918
Pages (from-to)1900-1905
Number of pages6
JournalIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume55
Issue number9
DOIs
StatePublished - Sep 2008
Externally publishedYes

Bibliographical note

Funding Information:
Manuscript received January 9, 2007; accepted April 6, 2008. The authors gratefully acknowledge the support of Texas Advanced Research Program. H. Kim, V. Bedekar, and R. A. Islam are with Materials Science and Engineering, University of Texas, Arlington, TX. W.-H. Lee is with the Automation & Robotics Research Institute, Fort Worth, TX. D. Leo and S. Priya are with the Center for Intelligent Material Systems and Structures (CIMSS), Mechanical Engineering, Virginia Tech, Blacksburg, VA (e-mail: [email protected]). Digital Object Identifier 10.1109/TUFFC.881

Fingerprint

Dive into the research topics of 'Laser-machined piezoelectric cantilevers for mechanical energy harvesting'. Together they form a unique fingerprint.

Cite this