Large area nanolithographic templates by selective etching of chemically stained block copolymer thin films

Roberto Olayo-Valles, M. S. Lund, C. Leighton, Marc A. Hillmyer

Research output: Contribution to journalArticlepeer-review

74 Scopus citations

Abstract

Magnetic nanodot arrays were prepared from thin film templates of cylinder-forming polystyrene-polylactide diblock copolymers by first annealing the films to obtain PLA cylinders oriented perpendicular to the surface, then selectively staining the PS matrix with RuO4 vapors, followed by etching the cylinders by O2-reactive ion etching. Metal was then deposited by molecular beam deposition and finally the polymer mask was lifted off.

Original languageEnglish (US)
Pages (from-to)2729-2731
Number of pages3
JournalJournal of Materials Chemistry
Volume14
Issue number18
DOIs
StatePublished - Sep 21 2004

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