Large area nanolithographic templates by selective etching of chemically stained block copolymer thin films

Roberto Olayo-Valles; M. S. Lund; C. Leighton; Marc A. Hillmyer

doi:10.1039/b408639b

Large area nanolithographic templates by selective etching of chemically stained block copolymer thin films

Roberto Olayo-Valles, M. S. Lund, C. Leighton, Marc A. Hillmyer

Research output: Contribution to journal › Article › peer-review

74 Scopus citations

Abstract

Magnetic nanodot arrays were prepared from thin film templates of cylinder-forming polystyrene-polylactide diblock copolymers by first annealing the films to obtain PLA cylinders oriented perpendicular to the surface, then selectively staining the PS matrix with RuO₄ vapors, followed by etching the cylinders by O₂-reactive ion etching. Metal was then deposited by molecular beam deposition and finally the polymer mask was lifted off.

Original language	English (US)
Pages (from-to)	2729-2731
Number of pages	3
Journal	Journal of Materials Chemistry
Volume	14
Issue number	18
DOIs	https://doi.org/10.1039/b408639b
State	Published - Sep 21 2004

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title = "Large area nanolithographic templates by selective etching of chemically stained block copolymer thin films",

abstract = "Magnetic nanodot arrays were prepared from thin film templates of cylinder-forming polystyrene-polylactide diblock copolymers by first annealing the films to obtain PLA cylinders oriented perpendicular to the surface, then selectively staining the PS matrix with RuO4 vapors, followed by etching the cylinders by O2-reactive ion etching. Metal was then deposited by molecular beam deposition and finally the polymer mask was lifted off.",

author = "Roberto Olayo-Valles and Lund, {M. S.} and C. Leighton and Hillmyer, {Marc A.}",

year = "2004",

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AU - Leighton, C.

AU - Hillmyer, Marc A.

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N2 - Magnetic nanodot arrays were prepared from thin film templates of cylinder-forming polystyrene-polylactide diblock copolymers by first annealing the films to obtain PLA cylinders oriented perpendicular to the surface, then selectively staining the PS matrix with RuO4 vapors, followed by etching the cylinders by O2-reactive ion etching. Metal was then deposited by molecular beam deposition and finally the polymer mask was lifted off.

AB - Magnetic nanodot arrays were prepared from thin film templates of cylinder-forming polystyrene-polylactide diblock copolymers by first annealing the films to obtain PLA cylinders oriented perpendicular to the surface, then selectively staining the PS matrix with RuO4 vapors, followed by etching the cylinders by O2-reactive ion etching. Metal was then deposited by molecular beam deposition and finally the polymer mask was lifted off.

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