Keyphrases
Thermal Degradation
100%
Carbon Plasma
100%
Amorphous Carbon Film
100%
Plasma Energy
75%
Thermogravimetric Analysis
50%
High Energy
25%
N-value
25%
Mechanism-based
25%
Temperature Effect
25%
Thermal Stability
25%
Diffusion Resistance
25%
Apparent Activation Energy
25%
Bonding Structure
25%
DC Magnetron Sputtering
25%
Structure Density
25%
High Thermal Stability
25%
Film Structure
25%
Decomposition Temperature
25%
Thermal Low
25%
Film Deposition
25%
Bonding Ratio
25%
Decomposition Mechanism
25%
Isothermal Thermogravimetry
25%
Decomposition Stages
25%
Decomposed Products
25%
Apparent Reaction Order
25%
Nth-order Reaction
25%
Material Science
Film
100%
Amorphous Carbon
100%
Thermal Degradation
100%
Carbon Films
100%
Thermogravimetric Analysis
66%
Thermal Stability
66%
Density
33%
Magnetron Sputtering
33%
Activation Energy
33%
Film Deposition
33%
Thin Films
33%
Engineering
Thermal Degradation
100%
Amorphous Carbon
100%
Reaction Order
100%
Mols
50%
Isothermal
50%
Magnetron
50%
Apparent Activation Energy
50%
Thin Films
50%
Deposited Structure
50%