Keyphrases
Inductively Coupled Plasma
100%
Low Pressure
100%
Non-local Approximations
100%
Kinetic Approach
100%
Two-dimensional Modeling
100%
High Energy
50%
Electron Energy
50%
Low Energy
50%
Density Profile
50%
Potential Profile
50%
Energy Range
50%
Plasma Potential
50%
Kinetic Model
50%
Radiofrequency Fields
50%
Wave Equation
50%
Computational Efficiency
50%
Boltzmann Equation
50%
Electron Distribution Function
50%
Inductively Coupled
50%
2D Kinetics
50%
Complex Waves
50%
Two-dimensional Fluids
50%
Fluid Model
50%
High-density Plasma
50%
Electron Collisions
50%
Kinetic Scheme
50%
Self-consistent Scheme
50%
Kinetic Treatment
50%
Plasma Density Profile
50%
Engineering
Two Dimensional
100%
Inductively Coupled Plasma
100%
Dimensional Modeling
100%
Good Agreement
33%
Experimental Result
33%
Computational Efficiency
33%
Kinetic Model
33%
Boltzmann Equation
33%
Fluid Model
33%
Electron Distribution Function
33%
Subdomains
33%
Electric Field
33%
Electron Energy
33%
Plasma Density
33%
Physics
Blood Plasma
100%
Plasma Density
100%
Plasma Potential
50%
Wave Equation
50%
Boltzmann Equation
50%
Electron Energy
50%
Electron Scattering
50%
Electron Distribution
50%
Distribution Function
50%
Electron Plasma
50%
Electric Field
50%
Material Science
Plasma Density
100%
Density
50%