In this paper, we present a two-dimensional (2-D) kinetic model for low-pressure inductively coupled discharges. The kinetic treatment of the plasma electrons is based on a hybrid kinetic scheme in which the range of electron energies is divided into two subdomains. In the low energy range the electron distribution function is determined from the traditional nonlocal approximation. In the high energy part the complete spatially dependent Boltzmann equation is solved. The scheme provides computational efficiency and enables inclusion of electron-electron collisions which are important in low-pressure high-density plasmas. The self-consistent scheme is complemented by a 2-D fluid model for the ions and the solution of the complex wave equation for the RF electric field. Results of this model are compared to experimental results. Good agreement in terms of plasma density and potential profiles is observed. In particular, the model is capable of reproducing the transition from on-axis to off-axis peaked density profiles as observed in experiments which underlines the significant improvements compared to models purely based on the traditional nonlocal approximation.
Bibliographical noteFunding Information:
Manuscript received December 2, 1998; revised April 7, 1999. This work was supported by the National Science Foundation under Grant ECS-9713137 and supported in part by the University of Minnesota, Supercomputing Institute for Digital Simulation and Advanced Computation.
- Electron kinetics
- Hybrid plasma model
- Inductively coupled discharge