Key technologies of thermally actuated sillicon micropump

Cui Tianhong; Zhou Zhaoying; Wang Xiaohao; Ye Xiongying; Yang Yue; Zhang Wendong; Lü Miao; Zhao Yanjun

Key technologies of thermally actuated sillicon micropump

Cui Tianhong, Zhou Zhaoying, Wang Xiaohao, Ye Xiongying, Yang Yue, Zhang Wendong, Lü Miao, Zhao Yanjun

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

A thermo-driven sillicon micropump with novel structure is presented. The fabrication processes of this micropump are analyzed in summarize and measured in individual experiments.

Original language	English (US)
Pages (from-to)	42
Number of pages	1
Journal	Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering
Volume	35
Issue number	1
State	Published - 1999

Keywords

MEMS
Micropump
Silicon micromachining

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@article{a2af2907a769432b96c268d89b97b371,

title = "Key technologies of thermally actuated sillicon micropump",

abstract = "A thermo-driven sillicon micropump with novel structure is presented. The fabrication processes of this micropump are analyzed in summarize and measured in individual experiments.",

keywords = "MEMS, Micropump, Silicon micromachining",

author = "Cui Tianhong and Zhou Zhaoying and Wang Xiaohao and Ye Xiongying and Yang Yue and Zhang Wendong and L{\"u} Miao and Zhao Yanjun",

year = "1999",

language = "English (US)",

volume = "35",

pages = "42",

journal = "Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering",

issn = "0577-6686",

publisher = "Editorial Office of Chinese Journal of Mechanical Engineering",

number = "1",

}

TY - JOUR

T1 - Key technologies of thermally actuated sillicon micropump

AU - Tianhong, Cui

AU - Zhaoying, Zhou

AU - Xiaohao, Wang

AU - Xiongying, Ye

AU - Yue, Yang

AU - Wendong, Zhang

AU - Miao, Lü

AU - Yanjun, Zhao

PY - 1999

Y1 - 1999

N2 - A thermo-driven sillicon micropump with novel structure is presented. The fabrication processes of this micropump are analyzed in summarize and measured in individual experiments.

AB - A thermo-driven sillicon micropump with novel structure is presented. The fabrication processes of this micropump are analyzed in summarize and measured in individual experiments.

KW - MEMS

KW - Micropump

KW - Silicon micromachining

UR - http://www.scopus.com/inward/record.url?scp=0346393920&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0346393920&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0346393920

SN - 0577-6686

VL - 35

SP - 42

JO - Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

JF - Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering

IS - 1

ER -

Key technologies of thermally actuated sillicon micropump

Abstract

Keywords

UN SDGs

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