Key technologies of thermally actuated silicon micropump

Tianhong Cui, Zhaoying Zhou, Xiaohao Wang, Xiongying Ye, Yue Yang, Wendong Zhang, Miao Lu, Yanjun Zhao

Research output: Contribution to journalArticle

Abstract

A thermo-driven silicon micropump with novel structure was presented. Its principle and structure were described. The key processing technologies of this micropump were introduced and analyzed.

Original languageEnglish (US)
Pages (from-to)39-42
Number of pages4
JournalJixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering
Volume35
Issue number1
StatePublished - 1999

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    Cui, T., Zhou, Z., Wang, X., Ye, X., Yang, Y., Zhang, W., Lu, M., & Zhao, Y. (1999). Key technologies of thermally actuated silicon micropump. Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering, 35(1), 39-42.