TY - GEN
T1 - Iterative Learning Control for image based visual servoing applications
AU - Sutanto, Erick
AU - Alleyne, Andrew G.
PY - 2014
Y1 - 2014
N2 - Fabrication of nano/micro-scale functional devices, in the context of a continuous or semi-continuous manufacturing process, is often performed via successive processes in multiple localized zones. As the substrate traverses downstream in the process flow, proper registration of the pre-existing features is necessary prior to entering the next fabrication zone in order to accurately complement previous manufacturing steps. In this work, we consider a 2D planar arrangement where the substrate can be panned and oriented and we performed a direct visual servoing technique to correct both the pose and the translational alignment of a pre-existing feature. Based on the recorded image data, Iterative Learning Control (ILC) is implemented on top of the feedback controller to simultaneously improve the position and orientation tracking precision of the feature.
AB - Fabrication of nano/micro-scale functional devices, in the context of a continuous or semi-continuous manufacturing process, is often performed via successive processes in multiple localized zones. As the substrate traverses downstream in the process flow, proper registration of the pre-existing features is necessary prior to entering the next fabrication zone in order to accurately complement previous manufacturing steps. In this work, we consider a 2D planar arrangement where the substrate can be panned and oriented and we performed a direct visual servoing technique to correct both the pose and the translational alignment of a pre-existing feature. Based on the recorded image data, Iterative Learning Control (ILC) is implemented on top of the feedback controller to simultaneously improve the position and orientation tracking precision of the feature.
KW - Iterative learning control
KW - Manufacturing systems
KW - Vision-based control
UR - http://www.scopus.com/inward/record.url?scp=84905694244&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84905694244&partnerID=8YFLogxK
U2 - 10.1109/ACC.2014.6859186
DO - 10.1109/ACC.2014.6859186
M3 - Conference contribution
AN - SCOPUS:84905694244
SN - 9781479932726
T3 - Proceedings of the American Control Conference
SP - 1811
EP - 1816
BT - 2014 American Control Conference, ACC 2014
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2014 American Control Conference, ACC 2014
Y2 - 4 June 2014 through 6 June 2014
ER -
