Iridium oxide reference electrodes for neurochemical sensing with MEMS microelectrode arrays

Robert K. Franklin, Matthew D. Johnson, Katharine A. Scott, Jun Ho Shim, Hakhyun Nam, Daryl R. Kipke, Richard B. Brown

Research output: Chapter in Book/Report/Conference proceedingConference contribution

14 Scopus citations

Abstract

We report for the first time a micromachined, silicon neural probe with an integrated iridium oxide (IrOx) quasi reference electrode for neurochemical recordings. The probes have a 1.5×103 μm 2 IrOx reference electrode, a 1.5×103 μm2 Pt counter electrode, three circular Pt working electrodes, and three circular IrOx electrodes for electrical recording. Several different electrode sizes (4 to 50μm radius) were fabricated in order to study the effects of electrode size. In vitro evaluation of the probes demonstrated close correlation between results obtained using a Ag/AgCl reference electrode and the on-chip IrOx reference electrode.

Original languageEnglish (US)
Title of host publicationProceedings of the Fourth IEEE Conference on Sensors 2005
Pages1400-1403
Number of pages4
DOIs
StatePublished - Dec 1 2005
EventFourth IEEE Conference on Sensors 2005 - Irvine, CA, United States
Duration: Oct 31 2005Nov 3 2005

Publication series

NameProceedings of IEEE Sensors
Volume2005

Other

OtherFourth IEEE Conference on Sensors 2005
Country/TerritoryUnited States
CityIrvine, CA
Period10/31/0511/3/05

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