ION-Sensitive field effect transistor sensors using suspended graphene nanoribbon patterned by shrink lithography

B. Zhang; T. Cui

doi:10.31438/trf.hh2012.54

ION-Sensitive field effect transistor sensors using suspended graphene nanoribbon patterned by shrink lithography

B. Zhang, T. Cui

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Low-cost and facile shrink lithography derived graphene nanoribbon (GNR) was suspended on the channel to form an ion-sensitive field effect transistor (ISFET), and its pH sensing application is presented. By combining a thermoplastic film with a molding process, GNR patterns 50 nm wide were achieved in a low-cost and simple way. Ambipolar characteristics of annealed suspended GNR ISFET present an enhanced ambipolar effect. In comparison, unsuspended GNR and microscale graphene sheets based ISFETs were characterized under the same design, fabrication, and measurement conditions, showing that the suspended GNR ISFET is superior in sensitivity and detection limits.

Original language	English (US)
Title of host publication	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Editors	Mehran Mehregany, David J. Monk
Publisher	Transducer Research Foundation
Pages	205-208
Number of pages	4
ISBN (Electronic)	9780964002494
DOIs	https://doi.org/10.31438/trf.hh2012.54
State	Published - 2012
Event	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 - Hilton Head, United States Duration: Jun 3 2012 → Jun 7 2012

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Other

Other	2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Country	United States
City	Hilton Head
Period	6/3/12 → 6/7/12

Access

10.31438/trf.hh2012.54

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Cite this

Zhang, B., & Cui, T. (2012). ION-Sensitive field effect transistor sensors using suspended graphene nanoribbon patterned by shrink lithography. In M. Mehregany, & D. J. Monk (Eds.), 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012 (pp. 205-208). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2012.54

ION-Sensitive field effect transistor sensors using suspended graphene nanoribbon patterned by shrink lithography. / Zhang, B.; Cui, T.

2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. ed. / Mehran Mehregany; David J. Monk. Transducer Research Foundation, 2012. p. 205-208 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Zhang, B & Cui, T 2012, ION-Sensitive field effect transistor sensors using suspended graphene nanoribbon patterned by shrink lithography. in M Mehregany & DJ Monk (eds), 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 205-208, 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012, Hilton Head, United States, 6/3/12. https://doi.org/10.31438/trf.hh2012.54

Zhang B, Cui T. ION-Sensitive field effect transistor sensors using suspended graphene nanoribbon patterned by shrink lithography. In Mehregany M, Monk DJ, editors, 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. Transducer Research Foundation. 2012. p. 205-208. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). https://doi.org/10.31438/trf.hh2012.54

Zhang, B. ; Cui, T. / ION-Sensitive field effect transistor sensors using suspended graphene nanoribbon patterned by shrink lithography. 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012. editor / Mehran Mehregany ; David J. Monk. Transducer Research Foundation, 2012. pp. 205-208 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

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