TY - GEN
T1 - ION-Sensitive field effect transistor sensors using suspended graphene nanoribbon patterned by shrink lithography
AU - Zhang, B.
AU - Cui, T.
N1 - Publisher Copyright:
© 2012 TRF.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - Low-cost and facile shrink lithography derived graphene nanoribbon (GNR) was suspended on the channel to form an ion-sensitive field effect transistor (ISFET), and its pH sensing application is presented. By combining a thermoplastic film with a molding process, GNR patterns 50 nm wide were achieved in a low-cost and simple way. Ambipolar characteristics of annealed suspended GNR ISFET present an enhanced ambipolar effect. In comparison, unsuspended GNR and microscale graphene sheets based ISFETs were characterized under the same design, fabrication, and measurement conditions, showing that the suspended GNR ISFET is superior in sensitivity and detection limits.
AB - Low-cost and facile shrink lithography derived graphene nanoribbon (GNR) was suspended on the channel to form an ion-sensitive field effect transistor (ISFET), and its pH sensing application is presented. By combining a thermoplastic film with a molding process, GNR patterns 50 nm wide were achieved in a low-cost and simple way. Ambipolar characteristics of annealed suspended GNR ISFET present an enhanced ambipolar effect. In comparison, unsuspended GNR and microscale graphene sheets based ISFETs were characterized under the same design, fabrication, and measurement conditions, showing that the suspended GNR ISFET is superior in sensitivity and detection limits.
UR - http://www.scopus.com/inward/record.url?scp=84944678064&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84944678064&partnerID=8YFLogxK
U2 - 10.31438/trf.hh2012.54
DO - 10.31438/trf.hh2012.54
M3 - Conference contribution
AN - SCOPUS:84944678064
T3 - Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop
SP - 205
EP - 208
BT - 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
A2 - Mehregany, Mehran
A2 - Monk, David J.
PB - Transducer Research Foundation
T2 - 2012 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2012
Y2 - 3 June 2012 through 7 June 2012
ER -