Ion energy distribution functions in a planar inductively coupled RF discharge

Keyphrases

• Capacitive Coupling 33%
• Collisional Sheath 33%
• Electron Energy Distribution 33%
• Impact Energy 100%
• Induction Coil 33%
• Inductively Coupled 100%
• Inductively Coupled Plasma 33%
• Ion Energy Distribution 66%
• Ion Energy Distribution Function 100%
• Ion Impact 66%
• Low Impact 33%
• Low Pressure 33%
• Maxwellian 33%
• Non-Maxwellian Distribution 33%
• Planar Geometry 33%
• Plasma Density 33%
• Plasma Surface Modification 33%
• Presheath 33%
• Retarding Field Energy Analyzer 33%
• RF Discharge 100%
• Thermal Character 33%

Physics

• Distribution Function 100%
• Electron Distribution 20%
• Electron Energy 20%
• Energy Distribution 100%
• Plasma Density 20%