Ion-Assisted Plasma Etch Modeling of L10 Phase FePt Magnetic Media Fabrication with Embedded Mask Patterning Method

Jianxin Zhu, Patrick Quarterman, Jian Ping Wang

Research output: Contribution to journalArticlepeer-review

2 Scopus citations

Fingerprint

Dive into the research topics of 'Ion-Assisted Plasma Etch Modeling of L1<sub>0</sub> Phase FePt Magnetic Media Fabrication with Embedded Mask Patterning Method'. Together they form a unique fingerprint.

Engineering & Materials Science

Chemical Compounds