Investigations of the 147 nm radiative efficiency of Xe surface wave discharges

N. D. Gibson; U. Kortshagen; J. E. Lawler

doi:10.1063/1.363851

Investigations of the 147 nm radiative efficiency of Xe surface wave discharges

N. D. Gibson, U. Kortshagen, J. E. Lawler

Mechanical Engineering

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Abstract

The radiative efficiency of the 147 nm resonance radiation of Xe excited in a low pressure, high-frequency surface wave sustained plasma has been investigated. The radiative UV power has been obtained from optical absorption spectroscopic measurements of the Xe resonance level population and from Monte Carlo calculations of the effective decay rate of this level. Precise measurements of the rf power absorbed by the plasma enable the determination of the absolute vacuum ultraviolet discharge efficiency for the Xe surface wave discharge. Results show efficiencies up to more than 80(± 11)% .

Original language	English (US)
Pages (from-to)	1087-1092
Number of pages	6
Journal	Journal of Applied Physics
Volume	81
Issue number	3
DOIs	https://doi.org/10.1063/1.363851
State	Published - Feb 1 1997

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title = "Investigations of the 147 nm radiative efficiency of Xe surface wave discharges",

abstract = "The radiative efficiency of the 147 nm resonance radiation of Xe excited in a low pressure, high-frequency surface wave sustained plasma has been investigated. The radiative UV power has been obtained from optical absorption spectroscopic measurements of the Xe resonance level population and from Monte Carlo calculations of the effective decay rate of this level. Precise measurements of the rf power absorbed by the plasma enable the determination of the absolute vacuum ultraviolet discharge efficiency for the Xe surface wave discharge. Results show efficiencies up to more than 80(± 11)% .",

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AU - Gibson, N. D.

AU - Kortshagen, U.

AU - Lawler, J. E.

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Y1 - 1997/2/1

N2 - The radiative efficiency of the 147 nm resonance radiation of Xe excited in a low pressure, high-frequency surface wave sustained plasma has been investigated. The radiative UV power has been obtained from optical absorption spectroscopic measurements of the Xe resonance level population and from Monte Carlo calculations of the effective decay rate of this level. Precise measurements of the rf power absorbed by the plasma enable the determination of the absolute vacuum ultraviolet discharge efficiency for the Xe surface wave discharge. Results show efficiencies up to more than 80(± 11)% .

AB - The radiative efficiency of the 147 nm resonance radiation of Xe excited in a low pressure, high-frequency surface wave sustained plasma has been investigated. The radiative UV power has been obtained from optical absorption spectroscopic measurements of the Xe resonance level population and from Monte Carlo calculations of the effective decay rate of this level. Precise measurements of the rf power absorbed by the plasma enable the determination of the absolute vacuum ultraviolet discharge efficiency for the Xe surface wave discharge. Results show efficiencies up to more than 80(± 11)% .

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Investigations of the 147 nm radiative efficiency of Xe surface wave discharges

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