Investigations of the 147 nm radiative efficiency of Xe surface wave discharges

N. D. Gibson, U. Kortshagen, J. E. Lawler

Research output: Contribution to journalArticlepeer-review

12 Scopus citations

Abstract

The radiative efficiency of the 147 nm resonance radiation of Xe excited in a low pressure, high-frequency surface wave sustained plasma has been investigated. The radiative UV power has been obtained from optical absorption spectroscopic measurements of the Xe resonance level population and from Monte Carlo calculations of the effective decay rate of this level. Precise measurements of the rf power absorbed by the plasma enable the determination of the absolute vacuum ultraviolet discharge efficiency for the Xe surface wave discharge. Results show efficiencies up to more than 80(± 11)% .

Original languageEnglish (US)
Pages (from-to)1087-1092
Number of pages6
JournalJournal of Applied Physics
Volume81
Issue number3
DOIs
StatePublished - Feb 1 1997

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