Integration of Fluidically Self-Assembled Optoelectronic Devices Using a Silicon-Based Process

Joseph J. Talghader, Jay K. Tu, J. Stephen Smith

Research output: Contribution to journalArticlepeer-review

28 Scopus citations

Abstract

Fluidic Fluidic self-assembly (FSA) is a technique for efficient wafer-scale placement of large numbers of small or microscopic devices into receptor sites etched in a substrate. This paper reports the first complete planar process for integrating optoelectronic devices on a silicon wafer using fluidic self-assembly. Methods for bonding the devices into the receptor sites and subsequently contacting, planarizing, and interconnecting them are outlined.

Original languageEnglish (US)
Pages (from-to)1321-1323
Number of pages3
JournalIEEE Photonics Technology Letters
Volume7
Issue number11
DOIs
StatePublished - Nov 1995

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