Magneto-optical garnets (Y3 Fe5 O12 or YIG) were grown monolithically by a novel reactive radio-frequency sputtering method that used a partial pressure differential to increase sputtering rates. MgO and quartz substrates were used as they are good buffer layers and optical claddings for integration. A wide single-phase field for annealed YIG was found (26.9-43.2 at % Y), and the magnetic properties were measured. The films had refractive indices of 2.1 and out-of-plane Faraday rotations up to 0.2°μm at 633 nm. The dielectric matrix was used to calculate the difference in the propagation constants of forward and backward traveling light (ΔΒ=1.999× 10-5).
Bibliographical noteFunding Information:
This work was supported in part by the National Science Foundation under the CAREER program, Grant No. ECS-0134544.
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