Integrating yttrium iron garnet onto nongarnet substrates with faster deposition rates and high reliability

Sang Yeob Sung; Xiaoyuan Qi; Bethanie J.H. Stadler

doi:10.1063/1.2046733

Integrating yttrium iron garnet onto nongarnet substrates with faster deposition rates and high reliability

Sang Yeob Sung, Xiaoyuan Qi, Bethanie J.H. Stadler

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

63 Scopus citations

Abstract

Magneto-optical garnets (Y3 Fe5 O12 or YIG) were grown monolithically by a novel reactive radio-frequency sputtering method that used a partial pressure differential to increase sputtering rates. MgO and quartz substrates were used as they are good buffer layers and optical claddings for integration. A wide single-phase field for annealed YIG was found (26.9-43.2 at % Y), and the magnetic properties were measured. The films had refractive indices of 2.1 and out-of-plane Faraday rotations up to 0.2°μm at 633 nm. The dielectric matrix was used to calculate the difference in the propagation constants of forward and backward traveling light (ΔΒ=1.999× 10-5).

Original language	English (US)
Article number	121111
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	87
Issue number	12
DOIs	https://doi.org/10.1063/1.2046733
State	Published - Sep 19 2005

Bibliographical note

Funding Information:
This work was supported in part by the National Science Foundation under the CAREER program, Grant No. ECS-0134544.

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10.1063/1.2046733

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abstract = "Magneto-optical garnets (Y3 Fe5 O12 or YIG) were grown monolithically by a novel reactive radio-frequency sputtering method that used a partial pressure differential to increase sputtering rates. MgO and quartz substrates were used as they are good buffer layers and optical claddings for integration. A wide single-phase field for annealed YIG was found (26.9-43.2 at % Y), and the magnetic properties were measured. The films had refractive indices of 2.1 and out-of-plane Faraday rotations up to 0.2°μm at 633 nm. The dielectric matrix was used to calculate the difference in the propagation constants of forward and backward traveling light (ΔΒ=1.999× 10-5).",

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AU - Qi, Xiaoyuan

AU - Stadler, Bethanie J.H.

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AB - Magneto-optical garnets (Y3 Fe5 O12 or YIG) were grown monolithically by a novel reactive radio-frequency sputtering method that used a partial pressure differential to increase sputtering rates. MgO and quartz substrates were used as they are good buffer layers and optical claddings for integration. A wide single-phase field for annealed YIG was found (26.9-43.2 at % Y), and the magnetic properties were measured. The films had refractive indices of 2.1 and out-of-plane Faraday rotations up to 0.2°μm at 633 nm. The dielectric matrix was used to calculate the difference in the propagation constants of forward and backward traveling light (ΔΒ=1.999× 10-5).

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Integrating yttrium iron garnet onto nongarnet substrates with faster deposition rates and high reliability

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