Abstract
Novel highly integrated microreactors have been fabricated on silicon in order to dehydrogenate cyclohexane to benzene. There are 12 reactor chips on one single silicon wafer. The microreactor consists of three layers, which are reaction chamber integrated with heaters and thermal sensors, separation layer integrated with cantilever flowmeters and gas cover.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 423-427 |
| Number of pages | 5 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 4557 |
| DOIs | |
| State | Published - Dec 1 2001 |
| Event | Micromachining and Microfabrication Process Technology VII - San Francisco, CA, United States Duration: Oct 22 2001 → Oct 24 2001 |
Keywords
- MEMS
- Microfabrication
- Microreactor
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Reppond, A., Liang, Y., Fang, J., & Cui, T. (2001). Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene. Proceedings of SPIE - The International Society for Optical Engineering, 4557, 423-427. https://doi.org/10.1117/12.442974