Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene

Adam Reppond, Yu Liang, Ji Fang, Tianhong Cui

Research output: Contribution to journalConference article

Abstract

Novel highly integrated microreactors have been fabricated on silicon in order to dehydrogenate cyclohexane to benzene. There are 12 reactor chips on one single silicon wafer. The microreactor consists of three layers, which are reaction chamber integrated with heaters and thermal sensors, separation layer integrated with cantilever flowmeters and gas cover.

Original languageEnglish (US)
Pages (from-to)423-427
Number of pages5
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4557
DOIs
StatePublished - Dec 1 2001
EventMicromachining and Microfabrication Process Technology VII - San Francisco, CA, United States
Duration: Oct 22 2001Oct 24 2001

Keywords

  • MEMS
  • Microfabrication
  • Microreactor

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