Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene

Adam Reppond; Yu Liang; Ji Fang; Tianhong Cui

doi:10.1117/12.442974

Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene

Adam Reppond, Yu Liang, Ji Fang, Tianhong Cui

Mechanical Engineering

Research output: Contribution to journal › Conference article › peer-review

Abstract

Novel highly integrated microreactors have been fabricated on silicon in order to dehydrogenate cyclohexane to benzene. There are 12 reactor chips on one single silicon wafer. The microreactor consists of three layers, which are reaction chamber integrated with heaters and thermal sensors, separation layer integrated with cantilever flowmeters and gas cover.

Original language	English (US)
Pages (from-to)	423-427
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4557
DOIs	https://doi.org/10.1117/12.442974
State	Published - 2001
Event	Micromachining and Microfabrication Process Technology VII - San Francisco, CA, United States Duration: Oct 22 2001 → Oct 24 2001

Keywords

MEMS
Microfabrication
Microreactor

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10.1117/12.442974

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abstract = "Novel highly integrated microreactors have been fabricated on silicon in order to dehydrogenate cyclohexane to benzene. There are 12 reactor chips on one single silicon wafer. The microreactor consists of three layers, which are reaction chamber integrated with heaters and thermal sensors, separation layer integrated with cantilever flowmeters and gas cover.",

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author = "Adam Reppond and Yu Liang and Ji Fang and Tianhong Cui",

year = "2001",

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journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Micromachining and Microfabrication Process Technology VII ; Conference date: 22-10-2001 Through 24-10-2001",

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AU - Reppond, Adam

AU - Liang, Yu

AU - Fang, Ji

AU - Cui, Tianhong

PY - 2001

Y1 - 2001

N2 - Novel highly integrated microreactors have been fabricated on silicon in order to dehydrogenate cyclohexane to benzene. There are 12 reactor chips on one single silicon wafer. The microreactor consists of three layers, which are reaction chamber integrated with heaters and thermal sensors, separation layer integrated with cantilever flowmeters and gas cover.

AB - Novel highly integrated microreactors have been fabricated on silicon in order to dehydrogenate cyclohexane to benzene. There are 12 reactor chips on one single silicon wafer. The microreactor consists of three layers, which are reaction chamber integrated with heaters and thermal sensors, separation layer integrated with cantilever flowmeters and gas cover.

KW - MEMS

KW - Microfabrication

KW - Microreactor

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DO - 10.1117/12.442974

M3 - Conference article

AN - SCOPUS:0035766170

VL - 4557

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EP - 427

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

SN - 0277-786X

T2 - Micromachining and Microfabrication Process Technology VII

Y2 - 22 October 2001 through 24 October 2001

ER -

Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene

Abstract

Keywords

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