Integrated crystalline silicon and silicon nitride photonic devices on plastic substrates

Yu Chen, Mo Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Fully integrated photonic devices based on single-crystal silicon and silicon nitride including ring resonators and grating couplers have been successfully transferred to flexible plastic substrate with one hundred percent yield and uncompromised performance.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2014
PublisherOptical Society of American (OSA)
ISBN (Print)9781557529992
StatePublished - Jan 1 2014
EventCLEO: Science and Innovations, CLEO_SI 2014 - San Jose, CA, United States
Duration: Jun 8 2014Jun 13 2014

Other

OtherCLEO: Science and Innovations, CLEO_SI 2014
CountryUnited States
CitySan Jose, CA
Period6/8/146/13/14

Fingerprint Dive into the research topics of 'Integrated crystalline silicon and silicon nitride photonic devices on plastic substrates'. Together they form a unique fingerprint.

  • Cite this

    Chen, Y., & Li, M. (2014). Integrated crystalline silicon and silicon nitride photonic devices on plastic substrates. In CLEO: Science and Innovations, CLEO_SI 2014 Optical Society of American (OSA).